Method for preparing polymer micro lens array

Abstract

The invention provides a method for preparing a polymer micro lens array, and relates to the field of micro mechanical machining. The problems that in an existing hot press molding method, the cycle is long, cost is high, efficiency is low, and the dimensional precision and the shape of micro lenses can not be guaranteed easily are solved. The method comprises the steps that a graphical photoresist mask is formed on the surface of a silicon substrate; a microporous array is etched through a dry method; the microporous array is evenly covered with a dimethyl silicone polymer thin film, the microporous array is in sealing connection with a cavity, the pressure of a cavity is adjusted to change the ball coronary deformation of the dimethyl silicone polymer thin film, and the pressure is kept constant; photosensitive gel is poured on the dimethyl silicone polymer thin film, and a photosensitive gel convex mold is obtained through ultraviolet curing demolding; a mixture of dimethyl silicone polymer prepolymer and a curing agent is poured in the photosensitive gel convex mold to be heated and cured to obtain a dimethyl silicone polymer concave mold; the concave mold is used for conducting hot pressing on carbonic ester base materials, and a carbonic ester base micro lens array is obtained after demolding. The method for preparing the polymer micro lens array is easy to operate, high in efficiency, low in cost, small in error, good in repeatability, lossless in demolding and suitable for mass production.

Description

technical field [0001] The invention relates to the technical field of micromachining, in particular to a method for preparing a polymer microlens array. Background technique [0002] The microlens array is an array composed of a series of tiny lenses with a diameter ranging from a few microns to hundreds of millimeters in a certain arrangement. As an important micro-optical device, microlens array is widely used in the fields of optical communication, optical storage and digital display. It is more and more widely used in focal plane light collection, laser collimation, large area array display, optical efficiency enhancement, optical computing, optical interconnection and micro-scanning. At present, most of the microlens arrays used in the industrial field are made of quartz or glass, and the etching process is mostly used in the processing technology. However, the equipment used in the etching process is expensive and the process is complicated, which eventually leads to...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of long production cycle, high processing cost, low efficiency, and difficulty in ensuring the dimensional accuracy and shape of optical microlenses existing in the existing hot pressing forming method, the invention provides a method for preparing a polymer microlens array

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