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Preparation method for nitrogen oxygen titanium aluminum/titanium aluminum nitrogen and titanium aluminum composite film

A technology of titanium aluminum nitride and titanium oxynitride, which is applied in the field of preparation of nitrogen oxide composite films, can solve the problems of low infrared reflectivity, low film hardness, and poor substrate adhesion, so as to reduce coating costs and improve Effect of lifetime, good stability and repeatability

Inactive Publication Date: 2014-06-18
SHENYANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing titanium aluminum oxynitride (TiAlON) film layer is used as a solar selective absorption coating, which has a high absorption rate and a low infrared reflectance in the visible and near-infrared region.
However, the hardness of the film layer is generally low, and the adhesion to the substrate is generally poor.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] The method of making titanium aluminum oxynitride / titanium aluminum nitride / titanium aluminum (TiAlON / TiAlN / TiAl) composite film on commercial high-speed steel (W18Cr4V) is:

[0014] 1. Deposition technology and determination of target material composition: Multi-arc ion plating is determined as the preparation technology of titanium aluminum oxynitride / titanium aluminum nitride / titanium aluminum composite film, and a commercial titanium aluminum alloy target with a purity of 99.9% is selected for deposition. The atomic ratio of the titanium aluminum alloy target is Ti:Al=50:50.

[0015] 2. Selection and pre-treatment of substrate workpieces: select commercial high-speed steel (W18Cr4V) 2 mm thick plates as the substrate workpiece material, and use metal detergent to routinely degrease and decontaminate the substrate workpieces before putting them into the coating chamber for coating Treatment and surface polishing, and finally ultrasonic cleaning with acetone and ethan...

Embodiment 2

[0022] The method of making titanium aluminum oxynitride / titanium aluminum nitride / titanium aluminum (TiAlON / TiAlN / TiAl) composite film on commercial high-speed steel (W18Cr4V) is:

[0023] 1. Deposition technology and determination of target material composition: Multi-arc ion plating is determined as the preparation technology of titanium aluminum oxynitride / titanium aluminum nitride / titanium aluminum composite film, and a commercial titanium aluminum alloy target with a purity of 99.9% is selected for deposition. The atomic ratio of the titanium aluminum alloy target is Ti:Al=50:50.

[0024] 2. Selection and pre-treatment of the base workpiece: select commercial high-speed steel (W18Cr4V) 3 mm thick plate as the base workpiece material, and use metal detergent to routinely degrease and decontaminate the base workpiece before putting it into the coating chamber for coating Treatment and surface polishing, and finally ultrasonic cleaning with acetone and ethanol respectively,...

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PUM

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Abstract

The invention discloses a preparation method for a nitrogen oxygen titanium aluminum / titanium aluminum nitrogen and titanium aluminum composite film. The preparation method sequentially comprises the following steps: 1, Determining a precipitation technology and target components; 2, selecting and pretreating a substrate workpiece; 3, determining the suspension position of the substrate workpiece; 4, performing vacuum heating treatment; 5, determining a pre-bombardment process; 6, determining a precipitation process. According to the preparation method, the adhesive force between the film and a substrate can be improved, the hardness of the film can be improved, and excellent stability and repeatability can be achieved.

Description

technical field [0001] The invention relates to a method for preparing a nitrogen oxide composite film, in particular to a method for preparing a multi-arc ion-plated nitrogen oxide composite film by using various reactive gases, such as titanium aluminum oxynitride / titanium aluminum nitride / titanium aluminum composite film Preparation. Background technique [0002] Multi-arc ion plating is a vacuum physical deposition technology with multiple cathode arc evaporation sources that can be evaporated simultaneously. It has the remarkable characteristics of fast deposition speed, dense film structure, strong adhesion, and good uniformity. Titanium aluminum nitride is a film material with high hardness and high wear resistance, and its hardness and wear resistance are significantly higher than the traditional titanium nitride (TiN) film. However, the existing titanium aluminum oxynitride (TiAlON) film layer is used as a solar selective absorption coating, which has a high absorp...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06B32B9/04
Inventor 张钧蔡佳婧田红花张正贵丁龙先张业民刘世民
Owner SHENYANG UNIV
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