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Micro-bubble generator and manufacturing method thereof

A technology of micro-bubble generator and double-layer graphene, which is applied in the field of micro-electromechanical systems, can solve the problems of easy corrosion and high power consumption, and achieve the effects of not easy electrolysis or corrosion, prolonging life, and flexible design

Active Publication Date: 2014-06-04
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the above defects or improvement needs of the prior art, the present invention provides a microbubble generator and a preparation method thereof, which use carbon nanotubes as heating components and graphene as electrode materials to overcome the traditional metal electrode microbubble generators. The shortcomings of high power consumption and easy corrosion reduce the contact resistance of the micro-heater, thereby reducing the power consumption of the micro-bubble generator and effectively prolonging the life of the micro-bubble generator. The device has a simple structure, flexible design, and good performance. High-frequency response and dense integration potential have broad application prospects in advanced manufacturing

Method used

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preparation example Construction

[0019] Such as figure 1 and figure 2 As shown, the preparation method of the microbubble generator of the embodiment of the present invention comprises the following steps:

[0020] (1) Spin-coat a layer of PMMA4 on the surface of the metal foil 1 growing double-layer graphene 11, such as figure 2 (a) shown.

[0021] (2) Corrode the metal foil 1 with ferric chloride or ammonium persulfate solution to obtain the double-layer graphene 11 protected by PMMA4, wash it with deionized water, transfer it to the substrate 2 cleaned according to the standard CMOS process, and heat-treat Make bilayer graphene 11 and substrate 2 tightly combined, as figure 2 (b) shown.

[0022] (3) PMMA4 is removed by soaking in acetone, and the bilayer graphene 11 transferred to the substrate 2 is obtained, such as figure 2 (c) shown.

[0023] (4) Oxygen plasma reaction etches the double-layer graphene 11 to obtain two double-layer graphene electrodes and a double-layer graphene nanoribbon conn...

Embodiment 1

[0030] The preparation method of microbubble generator comprises the steps:

[0031] (1) Spin-coat a layer of PMMA with a thickness of about 200 nm on the surface of copper foil with double-layer graphene.

[0032] (2) Use 0.5mol / L ammonium persulfate solution to corrode the metal foil to obtain PMMA-protected double-layer graphene, wash it with deionized water for 3 times, transfer it to the substrate cleaned by the standard CMOS process, blow After drying, bake at 150°C for 10 minutes to make the double-layer graphene tightly bond with the substrate.

[0033] (3) PMMA was removed by immersion in acetone for 1 h, and bilayer graphene transferred to the substrate was obtained.

[0034] (4) Cover the double-layer graphene with silicon oxide nanowires as a mask, and react the oxygen plasma to etch the double-layer graphene to obtain two double-layer graphene electrodes and a double-layer graphene nanoribbon connecting the two electrodes, The distance between the two electrodes...

Embodiment 2

[0037] The preparation method of microbubble generator comprises the steps:

[0038] (1) Spin-coat a layer of PMMA with a thickness of about 200 nm on the surface of copper foil with double-layer graphene.

[0039] (2) Etch the metal foil with 0.5mol / L ammonium persulfate solution to obtain PMMA-protected double-layer graphene, wash it with deionized water for 4 times, transfer it to the substrate cleaned by the standard CMOS process, blow After drying, bake at 150°C for 10 minutes to make the double-layer graphene tightly bond with the substrate.

[0040] (3) PMMA was removed by immersion in acetone for 1 h, and bilayer graphene transferred to the substrate was obtained.

[0041] (4) Cover the double-layer graphene with silicon oxide nanowires as a mask, and react the oxygen plasma to etch the double-layer graphene to obtain two double-layer graphene electrodes and a double-layer graphene nanoribbon connecting the two electrodes, The distance between the two electrodes is 8...

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Abstract

The invention discloses a micro-bubble generator and a manufacturing method of the micro-bubble generator. The micro-bubble generator comprises a substrate, two double-layer graphene electrodes and a carbon nano tube. The two double-layer graphene electrodes are located on the substrate, and the distance between the electrodes is 1-8 microns. The carbon nano tube is connected with the two double-layer graphene electrodes to serve as a heating assembly. The manufacturing method includes the following steps that a metal foil surface on which double-layer graphene grows is coated with PMMA in a spinning mode; metal foil is removed, the double-layer graphene protected by the PMMA is transferred to the substrate, and the double-layer graphene is tightly combined with the substrate through heat treatment; the PMMA is removed; an oxygen plasma reaction is performed to etch the double-layer graphene, and the two double-layer graphene electrodes and a double-layer graphene nano belt connecting the two electrodes are obtained; annealing is performed under the vacuum conditions, so that the edge of the double-layer graphene nano belt is closed to form the carbon nano tube, and the micro-bubble generator is manufactured. According to the micro-bubble generator and the manufacturing method of the micro-bubble generator, power consumption of the micro-bubble generator is reduced, the service life of the micro-bubble generator is effectively prolonged, and the micro-bubble generator is simple in structure and flexible in design.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, and more specifically relates to a micro-bubble generator and a preparation method thereof. Background technique [0002] The microbubble generator consists of three parts: a substrate, a heating element and an electrode. The huge Joule heat generated by the heating element fixed between the electrodes heats the liquid to generate bubbles. The microbubble generator is not only the core of the thermal bubble thermal printing system, but also can be widely used in the MEMS field and microfluidic system as a bubble actuator, bubble valve and bubble power pump. For example, microbubble generators generate bubbles to drive liquid flow in capillary channels, serve as actuators for microbial mixing systems, and trap microbial particles. [0003] Existing micro-bubble generators all use or partly use metal materials, and the power consumption of the device is relatively high. At ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81C1/00
Inventor 周文利邓武竹
Owner HUAZHONG UNIV OF SCI & TECH
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