Reciprocating type multi-ionization-cavity atmospheric-pressure unbalance plasma reactor

Abstract

Provided is a reciprocating type multi-ionization-cavity atmospheric-pressure unbalance plasma reactor. A plurality of unbalance plasma ionization cavities are formed between a plate ground electrode and an alpha-A12O3 dielectric medium layer covering the surface of a plate high-voltage electrode, the plate ground electrode is provided with cooling liquid cavities, and reaction gas cooling cavities are further arranged between the cooling liquid cavities of the plate ground electrode. When the atmospheric-pressure unbalance plasma reactor works, after entering the reactor uniformly, raw material gas alternately passes through the unbalance plasma ionization cavities and the reaction gas cooling cavities, and is output through reaction gas outlets finally, electricity can be supplied to the unbalance plasma ionization cavities by adopting the same excitation power supply, and each ionization cavity can also utilize an independent excitation power supply. According to the reciprocating type multi-ionization-cavity atmospheric-pressure unbalance plasma reactor, plasma chemical reaction is conducted more sufficiently, the effect of the plasma chemical reaction is improved, so that discharging performance of each ionization cavity is optimized, and the progress of the plasma chemical reaction can be regulated and controlled more conveniently.

Description

technical field [0001] The invention belongs to the technical field of gas discharge and application, and relates to a gas discharge low-temperature plasma reactor, in particular to a reciprocating multi-ion chamber atmospheric pressure non-equilibrium plasma reactor. Background technique [0002] Atmospheric pressure non-equilibrium plasma is widely used in high-efficiency active oxygen radical preparation, ozone synthesis, material surface treatment, plasma display, ultraviolet light source, high-power CO 2 Lasers and other fields have achieved processing effects that are difficult to achieve with traditional methods, and have important application values. Compared with the traditional low-pressure non-equilibrium plasma generation technology, atmospheric pressure non-equilibrium plasma has higher energy utilization efficiency, and does not require a huge and complicated vacuum system and a strictly sealed vacuum chamber, so it is especially suitable for industrial continu...

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Problems solved by technology

[0004] Prolonging the length of the ionization chamber of the plasma reactor is one of the effective methods to increase the residence time of the reaction gas in the ionization chamber, but it is limited by the high-purity and large-area Al 2 o 3 Due to the limitations of dielectric layer fabrication and flat plate narrow-gap atmospheric pressure non-equilibrium plasma reactor processing technology, it is still difficult to directly extend the length of the ionization chamber of the plasma reactor, and it will cause the volume of the atmospheric pressure non-equilibrium plasma reactor to be too large and the cost will increase. Reduced reliability

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