Electric field induction rheology forming method of paraboloid-like microlens array

Abstract

Provided is an electric field induction rheology forming method of a paraboloid-like microlens array. A photoetching method is firstly used for preparing and processing an upper counter electrode hole mold, then a transparent electric-conduction indium tin oxide (ITO) glass lower counter electrode, after a direct current external electric field is exerted between the upper counter electrode and the lower counter electrode, polymer is dropped in an opening of a gap between the upper counter electrode and the lower counter electrode, the liquid level height and the shape of the polymer flowing into the gap between the upper counter electrode and the lower counter electrode are controlled by the electric field, curing and demoulding are carried out, and a paraboloid-like micro-concave-lens array is obtained; and then replication is carried out on the paraboloid-like micro-concave-lens array to finally obtain a paraboloid-like micro-convex-lens array. The method breaks through the limitation that a conventional microlens array preparation process can only be used for preparing a spherical lens, the obtained microlens array has a super-smooth surface and is better than a lens array obtained through material removal or a corrosion method, meanwhile, due to the fact that complex process control is not needed in the method, processing cost is greatly lowered, processing efficiency is improved, and the electric field induction rheology forming method can be widely used for a chip laboratory, a flat-panel display, optical system detection and observation and other respects.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to an electric field-induced rheological deformation method of a parabolic micro-lens array. Background technique [0002] Microlens refers to tiny lenses, usually with a diameter of 10 μm to 1 mm, and according to the different surface curvatures, microlenses can be divided into spherical microlenses and aspheric microlenses, of which aspheric microlenses can better eliminate Spherical aberration is more practical, and the array composed of these tiny lenses according to a certain filling rate and arrangement is a microlens array. In view of its huge application in many fields such as communication technology, optical measurement, flat panel display and imaging, various preparation methods for microlens arrays have been proposed, such as photoresist hot-melt method, inkjet printing method and excimer laser ablation. law etc. However, these methods can...

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Problems solved by technology

However, these methods can only prepare spherical microlenses, and the optical surface roughness obtained by the method of material removal or ablation is large, which seriously affects its adoption and promotion in the application field

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