Carbon-titanium composite coating and preparation method of coating
A composite coating, carbon-titanium technology, applied in the field of wear-resistant coatings, can solve the problems of unsatisfactory hardness and friction and wear performance, and achieve the effects of facilitating continuous industrial production, high bonding strength, and improving service life
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Embodiment 1
[0040] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:
[0041] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted to 10cm, and the revolution speed of the control sample stage 11 is 3rpm;
[0042] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...
Embodiment 2
[0049] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:
[0050] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted by 10cm, and the revolution speed of the control sample stage 11 is 3rpm;
[0051] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...
Embodiment 3
[0058] The carbon-titanium composite coating of the present invention is prepared by closed-field unbalanced magnetron sputtering, and the device for realizing the preparation method of the carbon-titanium composite coating of the present invention in the specific embodiment is adopted, and the preparation steps are as follows:
[0059] 1) Select the medical Ti6Al4V alloy as the matrix, place the matrix on the sample holder 12 on the sample stage 11, the graphite target 7 and the graphite target 9 work, the titanium target 8 works, and the titanium target 10 does not work, adjust the relationship between each target and the matrix The spacing is adjusted by 10cm, and the revolution speed of the control sample stage 11 is 3rpm;
[0060] Pre-evacuate the chamber to 4.5 x 10 -3 Pa, followed by pure argon gas, the flow rate of argon gas was controlled at 25 sccm, and the pre-sputtering was performed for 20 min at a bias voltage of -500V and a titanium target current of 0.2A and a ...
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