Effective method for doping nitrogen into carbon nanotips
A carbon nano-tip, effective technology, applied in nano-carbon, nano-technology, nano-technology and other directions, can solve problems such as influence and bad, and achieve the effect of improving luminous efficiency
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Embodiment 1
[0034] Embodiment 1: A kind of effective doping method of nitrogen in carbon nano tip, deposit a layer of gold film on Si substrate as catalyst layer, with CH 4 、H 2 and N 2 As the reaction gas, an amorphous carbon nanotip was prepared; the thickness of the gold film was about 10 nm, the substrate temperature was 850 °C, CH 4 The flow rate is 20sccm (sccm means that the gas flows through 1cm per minute under standard conditions 3 ), H 2 The flow rate is 70sccm, N 2 The flow rate is 30 sccm, the working pressure of the reaction chamber is 2000 Pa, and the bias current is 160 mA.
[0035] Figure 3 ~ Figure 7 The scanning electron micrograph of the photo shows that the carbon nanotip is formed, and the gold particle is located on the tip of the tip. Transmission scanning electron micrographs show that the formed carbon nanotips are amorphous. X-ray photoelectron spectroscopy revealed nitrogen doping at the amorphous carbon nanotips. According to the fitting of the X-ray ...
Embodiment 2
[0036] Embodiment 2: A kind of effective doping method of nitrogen in carbon nano-tip, deposit a layer of gold film on Si substrate as catalyst layer, with CH 4 、H 2 and N 2 As the reaction gas, an amorphous carbon nanotip was prepared; the thickness of the gold film was about 10 nm (nm is nanometer), the substrate temperature was 850 °C, CH 4 The flow rate is 20sccm, H 2 The flow rate is 70sccm, N 2 The flow rate is 40 sccm, the working pressure of the reaction chamber is 2000 Pa, and the bias current is 160 mA.
[0037] see Figure 8 ~ Figure 12 , The second embodiment prepares relevant photos and X-ray photoelectron spectra of nitrogen-doped amorphous carbon nano-tips. The scanning electron micrograph shows that carbon nanotips are also formed under this growth condition, with gold particles on top of the tips. Transmission scanning electron micrographs show that the formed carbon nanotips are amorphous. X-ray photoelectron spectroscopy revealed nitrogen doping at th...
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