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Aluminum-doped zinc oxide (AZO) transparent conducting film and preparation method thereof

A transparent conductive film, aluminum-doped zinc oxide technology, applied in liquid chemical plating, metal material coating process, coating and other directions, can solve problems such as being unsuitable for large-area production, unfavorable for flexible substrate coating, power consumption, etc. Achieve the effect of increasing anti-peeling ability, low cost and low resistivity

Inactive Publication Date: 2013-02-27
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But there are also some shortcomings, such as the sol-gel method requires the use of toxic organic solvents, and requires pretreatment at 150°C to 350°C, which is not conducive to coating on flexible substrates (generally with a temperature resistance below 200°C); electrochemical method Power consumption is required, the cost is high, and it is not suitable for large-scale production

Method used

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  • Aluminum-doped zinc oxide (AZO) transparent conducting film and preparation method thereof
  • Aluminum-doped zinc oxide (AZO) transparent conducting film and preparation method thereof
  • Aluminum-doped zinc oxide (AZO) transparent conducting film and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] Weigh 0.8g of zinc acetate dihydrate and 0.0137g of aluminum nitrate nonahydrate, add 18ml of ethanol, stir, then add 6ml of water and 0.6ml of glacial acetic acid to form a clear and transparent solution. [Al / Zn] is 1%,

[0061] Common soda-lime glass was used as the spin-coating substrate. Substrates are washed with detergent to remove visible stains from the surface; rinse with tap water. Then soak in a mixed solution of ultrapure water and ammonia water-hydrogen peroxide, and then ultrasonically clean; rinse with ultrapure water. Then soak and ultrasonically clean with ultrapure water, hydrochloric acid-hydrogen peroxide mixed solution; rinse with ultrapure water. Store in ethanol and air dry before use.

[0062] Coating using a spin coater. Add the liquid evenly and dropwise at rest. First, uniform the glue at 500rpm for 10 seconds, then at 1800rpm for 40 seconds, and repeat the spin coating 4 times.

[0063] The coated substrate was aged in a 60% RH environme...

Embodiment 2

[0068] Similar to Example 1, the only difference is that the amount of aluminum nitrate nonahydrate added is 0.0683g, and the heat treatment temperature is 200°C. [Al / Zn] is 5%.

Embodiment 3

[0070] Similar to Example 1, the only difference is that the amount of aluminum nitrate nonahydrate added is 0.0683g, and the stabilizer is 0.4ml formic acid. [Al / Zn] is 5%.

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Abstract

The invention relates to a method for preparing an aluminum-doped zinc oxide (AZO) transparent conducting film, which comprises the following steps: preparing a spin coating solution from a low-boiling solvent, a stabilizer and a hydrolyzable raw material, carrying out spin coating on a hydrophilic substrate, aging, and carrying out heat treatment and atmosphere annealing to obtain the AZO transparent conducting film. The method provided by the invention has the advantages of accessible raw materials, low cost and environment friendliness, and is simple to operate and suitable for flexible substrates. The invention also relates to an AZO transparent conducting film prepared by the method. The AZO transparent conducting film has the advantages of excellent compactness, low resistivity, adjustable doping rate and film thickness and excellent properties, and has wide application prospects in the field of photoelectricity.

Description

【Technical field】 [0001] The invention relates to the technical field of semiconductor materials, in particular to an aluminum-doped zinc oxide transparent conductive film and a preparation method thereof. 【Background technique】 [0002] Due to its high conductivity, transparent conductive film can absorb ultraviolet light, has high light transmittance in the visible light range, and has high reflectivity in the infrared light range, etc., making it suitable for use in portable electronic devices, flexible Electronic devices, solar cells, liquid crystal displays, multifunctional windows, and organic light-emitting diodes are widely used. [0003] At present, there are many transparent conductive materials, but the most mature and widely used ones are mainly indium tin oxide (ITO) and fluorine-doped tin oxide (FTO), which have high conductivity and good light emission in the visible region. transmittance. However, both of them also have some major disadvantages, such as the...

Claims

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Application Information

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IPC IPC(8): C23C18/12C23C18/00
Inventor 孙蓉陈锐强朱朋莉赵涛
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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