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Micronano manufacturing method of compound eye structure micro lens array

A technology of microlens array and compound eye, which is applied in the direction of lens, microstructure technology, microstructure device, etc., can solve the problems of inflexible control of structural parameters, low precision of compound eye structure on curved surface, expensive processing equipment, etc., and achieve low cost and easy Thermal deformation processing, the effect of a wide range of processing sizes

Inactive Publication Date: 2012-10-31
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These processing methods generally require expensive processing equipment, long processing time, and complicated processing procedures, resulting in high costs. At the same time, the precision of the compound eye structure on the curved surface is not high, and the structural parameters cannot be flexibly adjusted.

Method used

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  • Micronano manufacturing method of compound eye structure micro lens array
  • Micronano manufacturing method of compound eye structure micro lens array
  • Micronano manufacturing method of compound eye structure micro lens array

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Step 1, selecting the hard material K9 glass for preparing the microlens array template;

[0029] Step 2. Fix the hard material used to prepare the microlens array template on the three-dimensional precision translation stage, select an ultrashort pulse laser with a pulse width of 30 fs and a wavelength of 800 nm, and focus it on the hard material through an objective lens with a numerical aperture of 0.3 surface;

[0030] Step 3: The ultrashort pulse laser has a single pulse energy of 2.5uJ and a repetition rate of 1KHz, so that the ultrashort pulse laser acts on the surface of the material, and cooperates with the movement of the three-dimensional precision translation platform to ablate the required crater array;

[0031] Step 4: Place the hard material ablated into the crater array in a dilute solution of hydrofluoric acid with a volume concentration of 3% for corrosion, and the corrosion time is 120 minutes to prepare a microlens array template; supplemented by hea...

Embodiment 2

[0037] Step 1, selecting the hard material K9 glass for preparing the microlens array template;

[0038] Step 2. Fix the hard material used to prepare the microlens array template on the three-dimensional precision translation stage, select an ultrashort pulse laser with a pulse width of 50 fs and a wavelength of 400 nm, and focus it on the hard material through an objective lens with a numerical aperture value of 0.5 surface;

[0039] Step 3. Ultrashort pulse laser single pulse energy 5uJ, repetition frequency 1KHz, make ultrashort pulse laser act on the surface of the material, and cooperate with the movement of the three-dimensional precision translation stage to ablate the required crater array;

[0040] Step 4: Place the hard material ablated into the crater array in a diluent of hydrofluoric acid with a volume concentration of 5% for corrosion, and the corrosion time is 90 minutes to prepare a microlens array template; supplemented by heating in an ultrasonic oscillating...

Embodiment 3

[0044] Step 1, selecting the hard material K9 glass for preparing the microlens array template;

[0045]Step 2. Fix the hard material used to prepare the microlens array template on the three-dimensional precision translation stage, select an ultrashort pulse laser with a pulse width of 100 fs and a wavelength of 325 nm, and focus it on the hard material through an objective lens with a numerical aperture of 0.9 surface;

[0046] Step 3: The ultrashort pulse laser has a single pulse energy of 10uJ and a repetition rate of 1KHz, so that the ultrashort pulse laser acts on the surface of the material, and cooperates with the movement of the three-dimensional precision translation stage to ablate the required crater array;

[0047] Step 4. Put the hard material ablated into the crater array into a dilute hydrofluoric acid solution with a volume concentration of 10% for corrosion, and the corrosion time is 60 minutes to prepare a microlens array template; supplemented by heating in...

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Abstract

The invention discloses a micro-nano manufacturing method of a compound eye structure micro lens array, wherein a hard material for manufacturing a micro lens array template is fixed at a three-dimensional precision displacement platform, so that an ultra-short pulse laser acts on the surface of the material to ablate a desired crater array; the hard material on which the crater array is ablated is put into hydrofluoric acid diluent to be corroded; a PMMA (Polymethyl Methacrylate) chloroform solution is coated on the surface of the template uniformly by using a plane casting process, and subsequently dried and solidified naturally; a small ball is heated; and the back plane of a PMMA membrane is uniformly extruded by a ball crown until the membrane wraps the half ball to form a semispherical structure, thus obtaining the compound eye structure micro lens array. The high repeatability and the mass production with low cost of the compound eye structure micro lens array are realized; and meanwhile relevant parameters are flexible and adjustable.

Description

technical field [0001] The invention relates to the field of micro-nano structure and device preparation and femtosecond laser micro-nano processing, in particular to a micro-nano preparation method of a compound-eye structure micro-lens array. Background technique [0002] Insects in nature have a visual imaging system different from that of human eyes. Insect compound eyes are composed of 10~30000 small eyes, and the size of the small eyes is 10um~140um. They are evenly arranged on the hemispherical eyeball, and each small eye can be imaged independently. Because these small eyes are arranged on a curved surface, they independently receive light from a certain angle, resulting in a very wide viewing angle range of the compound eye; at the same time, the compound eye can capture dynamic targets much faster than the monocular imaging system. These unique optical properties have potential applications in the fields of industry, medicine and military, and have attracted wides...

Claims

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Application Information

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IPC IPC(8): G02B3/00B81C1/00
Inventor 陈烽杨青瞿谱波刘贺炜边浩杜广庆司金海侯洵
Owner XI AN JIAOTONG UNIV
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