Photoinduced thermal deformation image quality analyzing method of transmission-type optical element
A technology of optical components and analysis methods, applied in the direction of testing optical performance, etc., can solve the problems of large temperature gradient changes and affect the beam quality of the system, and achieve the effect of simple method, accurate temperature field fitting, and easy implementation.
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[0012] 1. According to the optical system structure design plan, establish the finite element model.
[0013] 2. Calculate the heat flux density of each unit of the finite element from the power of the light source and the material absorption rate as the input boundary condition of the thermal analysis software (I-DEAS), consider the radiation heat transfer between the optical element and the surrounding environment, and generate a thermal analysis model to solve the steady-state temperature of the system distribution, and the position deformation of each node is obtained through thermoelastic calculation.
[0014] 3. Use the deformed coordinates of the nodes to fit the deformed surface profile of each optical element.
[0015] 4. Using the node temperature, proceeding from the characteristics of the heat source of the optical system, use the cylindrical coordinate temperature basis function system of formula 1 to realize the accurate fitting of the temperature field.
[0016...
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