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Nano silicon film solar battery elliptic polarized light real-time monitoring preparation method

A nano-silicon thin film and solar cell technology, which is applied in the manufacture of circuits, electrical components, and final products, can solve the problems of no process repeatability, poor maturity, and low photoelectric conversion efficiency of thin-film solar cells, so as to improve repeatability Effect

Inactive Publication Date: 2012-07-11
BEIHANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the maturity of the thin-film preparation technology of all the above-mentioned thin-film solar cells is very poor, which is manifested in the low photoelectric conversion efficiency of thin-film solar cells and the lack of process repeatability

Method used

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  • Nano silicon film solar battery elliptic polarized light real-time monitoring preparation method
  • Nano silicon film solar battery elliptic polarized light real-time monitoring preparation method

Examples

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Effect test

Embodiment 1

[0033] See figure 1 A preparation method for real-time monitoring of ellipsoidal polarized light of a nano-silicon thin-film solar cell of the present invention, comprising the following steps:

[0034] Step 1: After the P-type silicon wafer is cleaned by the conventional silicon wafer cleaning process, that is, the improved RCA cleaning process, it is placed in a polytetrafluoroethylene container and etched with a dilute solution of HF: deionized water = 1:50 for 10 seconds time, and then rinse the HF acid with a large amount of deionized water within 30 seconds to remove the silicon dioxide layer on the single crystal silicon wafer. The method of chemical etching with alkaline solution is to use NaOH as a reactant and isopropanol as an additive to adjust the anisotropy factor of the corrosion rate. The mixed solution of NaOH and isopropanol is used for anisotropic etching of single crystal silicon. The NaOH concentration is 3 %, the amount of isopropanol is 5%, the reaction...

Embodiment 2

[0040] See figure 1 A preparation method for real-time monitoring of ellipsoidal polarized light of a nano-silicon thin-film solar cell of the present invention, comprising the following steps:

[0041] Step 1: After the N-type silicon wafer is cleaned by the conventional silicon wafer cleaning process, that is, the improved RCA cleaning process, it is placed in a polytetrafluoroethylene container and etched with a dilute solution of HF: deionized water = 1:50 for 10 seconds Then rinse the HF acid with a large amount of deionized water within 30 seconds to remove the silicon dioxide layer on the single crystal silicon wafer. The method of chemical etching with alkaline solution is to use NaOH as a reactant and isopropanol as an additive to adjust the anisotropy factor of the corrosion rate. The mixed solution of NaOH and isopropanol is used for anisotropic etching of single crystal silicon. The NaOH concentration is 3 %, the amount of isopropanol is 5%, the reaction temperatu...

Embodiment 3

[0047] See figure 1 A preparation method for real-time monitoring of ellipsoidal polarized light of a nano-silicon thin-film solar cell of the present invention, comprising the following steps:

[0048] Step 1: After the P-type silicon wafer is cleaned by the conventional silicon wafer cleaning process, that is, the improved RCA cleaning process, it is placed in a polytetrafluoroethylene container and etched with a dilute solution of HF: deionized water = 1:50 for 10 seconds Then rinse the HF acid with a large amount of deionized water within 30 seconds to remove the silicon dioxide layer on the single crystal silicon wafer. The method of chemical etching with alkaline solution is to use NaOH as a reactant and isopropanol as an additive to adjust the anisotropy factor of the corrosion rate. The mixed solution of NaOH and isopropanol is used for anisotropic etching of single crystal silicon. The NaOH concentration is 3 %, the amount of isopropanol is 5%, the reaction temperatu...

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Abstract

The invention relates to a nano silicon film solar battery elliptic polarized light real-time monitoring preparation method, which comprises five steps: step 1: anisotropic corrosion on a monocrystalline silicon chip is undertaken by adopting a wet chemistry method to obtain a pyramid-shaped napped silicon chip substrate; step 2: a back electrode of the nano silicon film solar battery is prepared through a heat evaporation method or a magnetron sputtering method; step 3: an I layer nano silicon film is prepared by adopting a plasma enhanced chemical gas-phase deposition method through silane SiH4, an N layer nano silicon film is prepared by introducing the silane SiH4 and phosphorane PH3 mixed gas, and a P layer nano silicon film is prepared by introducing silane SiH4 and borane B2H5 mixed gas; step 4: the growth of the film is instantly monitored by adopting elliptic polarized light during the deposition process of the nano silicon film in step 3; and step 5: a transparent conductive film electrode and a top electrode of the nano silicon film solar battery can be prepared by adopting the heat evaporation method, magnetron sputtering method or the silk screen printing technology. The method has good application prospect in the photoelectric application and novel energy technical field.

Description

(1) Technical field: [0001] The invention relates to a preparation method of a thin-film solar cell, in particular to a preparation method for real-time monitoring of elliptical polarized light of a nano-silicon thin-film solar cell, which belongs to the field of photoelectric application and new energy technology. (two) background technology: [0002] The reserves of non-renewable energy such as coal and oil are limited on the earth, and the rapid development of society requires a large amount of energy. Therefore, the energy problem has increasingly become a bottleneck restricting the development of the international society and economy. More and more countries have begun to implement the "Sunshine Plan" to develop solar power generation resources and seek new impetus for economic development. Solar energy is an inexhaustible clean energy source. The application of solar energy will neither cause air pollution nor affect the ecological balance. As long as the sun shines, ...

Claims

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Application Information

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IPC IPC(8): H01L31/18C23C14/54
CPCY02P70/50
Inventor 张维佳刘嘉马强孙月峰张冷吴然嵩
Owner BEIHANG UNIV
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