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Method for preparing antioxidant SiC coating on surface of graphite material

A graphite material, anti-oxidation technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of poor bonding ability, affecting the anti-oxidation ability of the coating, high equipment requirements, etc., and achieve thermal shock resistance Excellent high temperature oxidation resistance, good high temperature oxidation resistance, good compactness and uniformity

Inactive Publication Date: 2012-03-14
SHAANXI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the coatings prepared by these methods generally contain many microcracks and holes, which provide a way for the diffusion of oxygen, etc.; the bonding ability between the coating and the graphite matrix material is poor, causing the coating to peel off easily, thus affecting the coating. antioxidant capacity
Moreover, the CVD process is complex, with many influencing parameters, and requires high equipment

Method used

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  • Method for preparing antioxidant SiC coating on surface of graphite material
  • Method for preparing antioxidant SiC coating on surface of graphite material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Step 1: Preparation of silicon target material: Weigh 400g of silicon powder with a purity of 99.9%, add 50ml of PVA binder with a concentration of 30% by weight and mix evenly. The silicon target was obtained by drying at ℃.

[0022] Step 2: SiO 2 Grinding and polishing with sandpaper, ultrasonic cleaning in absolute ethanol, finally rinsing with deionized water, and drying for later use;

[0023] Step 3: Using ultra-high vacuum multifunctional magnetron sputtering coating equipment, place the silicon target prepared in step 1 on the radio frequency sputtering cathode in the coating chamber as a sputtering target, and install the graphite base material obtained in step 2 on the substrate holder in the sampling chamber.

[0024] Step 4: Vacuum the coating chamber and sample chamber to a vacuum degree of less than or equal to 10 -4 After Pa, high-purity Ar gas with a purity of 99.99% is passed into it. Ar gas is introduced into the vacuum coating chamber by the gas f...

Embodiment 2

[0027] Step 1: Preparation of silicon target material: Weigh 400g of silicon powder with a purity of 99.9%, add 50ml of PVA binder with a concentration of 35% by weight and mix evenly. The silicon target was obtained by drying at ℃.

[0028] Step 2: SiO 2 Grinding and polishing with sandpaper, ultrasonic cleaning in absolute ethanol, finally rinsing with deionized water, and drying for later use;

[0029] Step 3: Using ultra-high vacuum multifunctional magnetron sputtering coating equipment, place the Si target prepared in step 1 on the radio frequency sputtering cathode in the coating chamber as a sputtering target, and install the graphite matrix material obtained in step 2 on the substrate holder in the sampling chamber.

[0030] Step 4: Vacuum the coating chamber and sample chamber until the background vacuum is less than or equal to 10 -4 After Pa, high-purity Ar gas with a purity of 99.99% is passed into it. Ar gas is introduced into the vacuum coating chamber by the...

Embodiment 3

[0033] Step 1: Preparation of silicon target material: Weigh 400g of silicon powder with a purity of 99.9%, add 50ml of PVA binder with a concentration of 40% by weight and mix evenly. The silicon target was obtained by drying at ℃.

[0034] Step 2: SiO 2 Grinding and polishing with sandpaper, ultrasonic cleaning in absolute ethanol, finally rinsing with deionized water, and drying for later use;

[0035] Step 3: Using ultra-high vacuum multifunctional magnetron sputtering coating equipment, place the Si target prepared in step 1 on the radio frequency sputtering cathode in the coating chamber as a sputtering target, and install the graphite matrix material obtained in step 2 on the substrate holder in the sampling chamber.

[0036] Step 4: Vacuum the coating chamber and sample chamber until the background vacuum is less than or equal to 10 -4 After Pa, high-purity Ar gas with a purity of 99.99% is passed into it. Ar gas is introduced into the vacuum coating chamber by the...

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Abstract

The invention provides a method for preparing an antioxidant SiC coating on the surface of a graphite material, which comprises the following steps of: adopting an ultrahigh vacuum multifunctional magnetron sputtering coating device, selecting silicon powder with purity of 99.9% as a Si target material, selecting a high-purity argon gas with volume fraction of 99.99% as a sputtering gas, preparing a Si coating on the surface of the graphite material through radio frequency magnetron sputtering, and preparing the antioxidant SiC coating through vacuum heat treatment. The antioxidant SiC coating obtained through the preparation method has good compactness and uniformity, heat impact resistance and good high-temperature antioxidant property; the thickness of the antioxidant SiC coating can be conveniently controlled by regulating the technological parameters of magnetron sputtering and the temperature and the time of vacuum heat treatment; and the large-scale preparation of graphite-based SiC antioxidant coating can be realized through the preparation technology, and the technology has relatively simple process and good repeatability.

Description

technical field [0001] The invention relates to a method for preparing an anti-oxidation SiC coating on the surface of a graphite material, belonging to the field of protection of graphite base materials. Background technique [0002] Graphite material has excellent electrical conductivity, thermal conductivity and self-lubricating properties, has a small thermal expansion coefficient, excellent thermal shock resistance, and graphite material is easy to machine. Therefore, it has been widely used in the fields of machinery, electronics, semiconductors, metallurgy, and bioengineering, and has become an indispensable special engineering material. [0003] However, the high-temperature oxidation resistance of graphite materials is poor, which limits the expansion of the application field of graphite materials to a certain extent. The oxidation protection of graphite materials is the fundamental measure to prolong its working life and improve its working stability and reliabili...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35C04B41/87
Inventor 李翠艳黄剑锋费杰卢靖曹丽云吴建鹏
Owner SHAANXI UNIV OF SCI & TECH
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