Method for preparing high-voltage electrophoresis reagent acetone

Abstract

The invention relates to a method for preparing a high-voltage electrophoresis reagent acetone, which is used for an electrophoresis glass passivation process for a complementary metal-oxide-semiconductor (CMOS) silicon rectification device. The method comprises the following steps of: performing absorption treatment on raw material acetone by using a chromatographic column loaded with a 3A molecular sieve and anhydrous potassium carbonate; transferring the acetone into a distillation still, heating until the acetone is boiling, distilling, and collecting an acetone distillate at the temperature of between 55 and 57 DEG C, wherein a filler is a Raschig ring or a stainless steel Dixon ring; and finally, filtering the acetone distillate by using an organic filtering membrane with the aperture of 0.2mu m, wherein the filtering membrane is made of polyamide or polytetrafluoroethylene. The acetone prepared by the method can effectively remove harmful metal ion impurities which influence the composition of electric double layers and Zeta potential of glass dust particles. A prepared electrophoresis solution has low dielectric loss, and the apparent electrical conductivity and electrophoretic mobility are easy to regulate and control. The glass dust particles can automatically form a uniform coating on a silicon substrate, so that a glass passivation layer of a PN-junction groove of a device has consistent thickness; and the reverse electrical performance of the prepared device is stable.

Description

technical field [0001] The invention relates to a preparation method of reagent acetone, in particular to a preparation method of a high-voltage electrophoresis reagent acetone used in the electrophoretic glass passivation process of CMOS silicon rectifier devices. Background technique [0002] The electrophoretic glass passivation process of CMOS silicon rectifier devices is based on the electrophoresis deposition process of charged glass powder particles to the silicon substrate in the acetone medium under the action of an external electric field. Since acetone is a polar non-aqueous solvent, the conductivity is very low, and the electrophoresis process requires a higher voltage to compensate. Therefore, it belongs to high pressure electrophoresis. The migration process of glass powder particles in the electrophoretic fluid is not only related to its own mass and charge, but also closely related to its chemical atmosphere. In the electrophoretic solution, the rea...

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Problems solved by technology

[0003] According to the conventional process to prepare high-purity reagent acetone, its technical indicators and performance cannot meet the requirements of the electrophoretic glass passivation process for CMOS silicon rectifier devices. Therefore, it is necessary to develop a new process that can meet the requirements of users.

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