Method for manufacturing high-frequency acoustic self-focusing spherical probe

Abstract

The invention discloses a method for manufacturing a high-frequency acoustic self-focusing spherical probe, which comprises: (1) forming a silicon nitride layer on a substrate; (2) performing photoetching treatment on the silicon nitride layer and etching a hole, namely firstly performing the photoetching treatment on the silicon nitride layer, then exposing photoresist by using an exposure protection layer and an exposing apparatus in combination, later removing excessive photoresist by washing with developing solution, and finally etching the silicon nitride layer by using reactive ion etching (RIE) and forming a hole on the silicon nitride layer; and (3) placing the treated device in solution prepared from HF, HNO3, HAC in a volume ratio of 1:4:3, applying magneton stirring for corrosion, and thus obtaining the focusing spherical probe. The high-frequency acoustic self-focusing spherical probe prepared by the invention has smooth surface and reliable quality, and can reduce human factors influencing quality of probe in production process of the acoustic self-focusing spherical probe, greatly improve uniformity of quality and meet requirements for large-scale production.

Description

technical field [0001] The invention belongs to the field of preparation of ultrasonic scanning microscopic imaging equipment, and in particular relates to a preparation method of a high-frequency (GHz) acoustic self-focusing spherical probe. Background technique [0002] In recent years, ultrasonic scanning microscope (C-SAM) has been successfully applied in the fields of electronics industry, medical biopsy and acoustic therapy, especially in packaging technology research and laboratories. Due to the non-destructive detection capability of ultrasonic wave without removing the external packaging of components, C-SAM can effectively detect the damage caused by water vapor or heat energy in the structure of electronic components, such as delamination, air holes and cracks. When ultrasonic waves travel through the medium, if they encounter materials with different densities or elastic coefficients, reflected echoes will be generated. The intensity of this reflected echo will ...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for preparing a high-frequency acoustic self-focusing spherical probe, which uses chemical corrosion to reduce the human factors that affect the quality of the probe during the production process of the acoustic self-focusing device, and greatly solves the problem of uniformity of quality and The need for large-scale production, so as to improve efficiency, reduce costs, and achieve large-scale production

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