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Short arc type discharge lamp

A discharge lamp and short-arc technology, applied to discharge lamps, gas discharge lamps, high-pressure discharge lamps, etc., can solve problems such as overheating, hypertrophy, and illuminance drop

Inactive Publication Date: 2011-01-26
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Moreover, especially at the time of full load / standby lighting, such deformation occurs repeatedly, and the protrusion becomes hypertrophic due to being accumulated
[0012] Then, the discharge concentrates on the enlarged protruding part, and the protruding part is abnormally overheated, and the electrode material evaporates and adheres to the inner wall of the luminous tube, and the inner wall of the luminous tube turns black, causing a problem that the illuminance drops rapidly.

Method used

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Examples

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Embodiment Construction

[0042] figure 1 It is a cross-sectional view of the first embodiment, (A) is an assembly cross-sectional view, and (B) is an explanatory view of an assembly process.

[0043] In the drawing, an opening 34 opening on the front end surface of the anode 31 is formed at the central portion of the front end surface 33 . Separately from the anode 31, an insertion body 35 made of the same material as the anode is formed in a shape matching the opening 34, and the insertion body 35 sandwiches the buffer member 36 therebetween and is pressed by means of driving or the like. inserted into the opening 34.

[0044] Specifically, an insertion body 35 made of tungsten is inserted into the opening 34 of the front end surface of the anode 31 made of tungsten. conical.

[0045] The buffer member 36 is made of a metal material that has a smaller yield stress than the anode 31 and the insert 35 at the same temperature, specifically, it is made of tantalum, molybdenum, niobium, or rhenium, an...

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Abstract

The invention provides a short arc type discharge lamp. A pair of anode and cathode is relatively configured within a light-emitting tube. An electrode structure is configured so that the middle part in the front end of the anode cannot be much farther than a surrounding annular part, and the lamp does not become black due to evaporation of an electrode material particularly when the lamp is lighted regularly at rated power and the lamp is lighted in full load / standby mode at the power less than the rated power. The short arc type discharge lamp is characterized in that a buffer component consisting of a material with yield stress smaller than the electrode material is sandwiched between the middle part in the front end of the anode and the surrounding annular part. The thermal stress of the middle part in the front end is relaxed through the buffer component.

Description

technical field [0001] The present invention relates to a short-arc discharge lamp, particularly a short-arc discharge lamp suitable for use as a light source for exposure in the semiconductor and liquid crystal manufacturing fields, and as a light source for backlighting a projector. Background technique [0002] A short-arc discharge lamp is used as a light source for an exposure device or a backlight of a projector by combining it with an optical system because the distance between the ends of a pair of electrodes facing each other in the arc tube is short and approximates a point light source. [0003] Japanese Patent Application Laid-Open No. 10-188890 discloses a conventional short-arc discharge lamp. [0004] Figure 7 discloses this conventional short-arc discharge lamp in , the short-arc discharge lamp 1 has a light-emitting tube 10 having a substantially spherical light-emitting portion 11 in the center and sealing portions 12 at both ends. In the arc tube 10, a c...

Claims

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Application Information

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IPC IPC(8): H01J61/04
CPCH01J61/86H01J61/0732
Inventor 山田刚千贺岳人中岛贡
Owner USHIO DENKI KK
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