Process for preparing selective emitter solar crystalline silicon solar cell

Abstract

The invention discloses a process for preparing a selective emitter solar crystalline silicon solar cell, which comprises the following steps of: selecting a silicon wafer, plating a layer of amorphous silicon film serving as a diffused semi-blocking layer on a diffusing surface, making a mask complementary with a front electrode on the amorphous silicon film, corroding the amorphous silicon film not covered by the mask by adopting alkali liquor to obtain a front electrode pattern, removing the mask on the amorphous silicon film, performing selective phosphorus diffusion on the silicon wafer under the blocking of the amorphous silicon film to obtain doped layers with different concentrations, and finally performing subsequent treatment to prepare the solar cell. The preparation process is concise and low in cost, is convenient to be compatible with the conventional solar cell equipment without large-scale equipment change, and is suitable for large-scale mass production; and the amorphous silicon film is adopted as the semi-blocking layer of selective diffusion, so the process controllability is high and the repeatability is high.

Description

technical field [0001] The invention belongs to the field of solar cells, and in particular relates to a preparation process of a selective emitter crystalline silicon solar cell. Background technique [0002] Conventional solar cells produced on a large scale are difficult to break through the stable efficiency of 18%. Therefore, research work on improving the efficiency of crystalline silicon solar cells has been widely carried out at home and abroad. Among them, selective emitter is an effective way. [0003] At present, there are many preparation processes for selective emitter solar cells. The preparation method of the emitter can be roughly divided into two-step diffusion method and one-step diffusion method. For example, Nanjing Zhongdian (Patent Publication No. CN 10110193A) first adopts low-concentration diffusion, then thermally grows a silicon dioxide layer, etches electrode patterns on the silicon dioxide layer, and then uses heavy doping to form high and low d...

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Problems solved by technology

[0004] Most of the above-mentioned methods for preparing selective emitter solar cells have been industrialized, but the process is complicated and the requirements for equipment are relatively high, and most of the required equipment requires high-cost development or technology introduction, so the development and introduction of equipment has become a key point

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