GaN-based LED having nanometer structure inserted layer
A nanostructure and intercalation technology, applied in electrical components, circuits, semiconductor devices, etc., can solve problems such as thermal effects, P-type damage, and difficulty in making ohmic contacts
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[0027] The present invention provides a GaN-based LED with a nanostructure insertion layer, comprising:
[0028] A substrate 10, the substrate 10 is made of silicon, sapphire, gallium nitride, gallium arsenide or silicon carbide;
[0029] A nanostructure template 11, the nanostructure template 11 is epitaxially grown on the substrate 10, the surface of the nanostructure template 11 is in a concave-convex shape, and the nanostructure template 11 on the concave-convex surface is obtained by electron beam exposure, holographic lithography, and two The porous alumina structure formed by step oxidation, the self-organized structure formed by metal under annealing conditions or the structure formed by silica nanoparticles is used as a mask to etch by dry etching method, or directly etched by focused ion beam wherein the surface of the nanostructure template 11 is a columnar structure, and the shape is a cylinder, a hexagonal prism, a square prism, a rhombus prism, a cubic prism, a t...
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