Method for reducing surface reflectivity of texture mono-crystalline silicon chip
A technology of surface reflectivity and monocrystalline silicon wafers, applied in sustainable manufacturing/processing, electrical components, climate sustainability, etc., can solve the problems of complex process, high cost, unfavorable mass production, etc., and achieve simple operation, Low cost and suitable for large-scale production
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[0012] This specific embodiment adopts the following technical scheme: put the monocrystalline silicon wafer with the suede surface made through alkali etching into the plasma etching equipment for maskless plasma etching, thereby further reducing the surface reflection of the monocrystalline silicon wafer Rate.
[0013] The gas is carbon tetrafluoride (CF 4 ) and oxygen (O 2 ), the flow ratio of the two is between 10:1-1:3, and the pressure range in the processing chamber is 1-20Pa.
[0014] The invention uses a radio frequency power source to activate gas ionization to generate plasma, the radio frequency frequency is 13.56MHz, and the power is between 400-600W.
[0015] Preferably, the plasma etching time of the present invention is 5-20 minutes, and after the single-crystal silicon wafer is plasma-etched, the thinning amount (mass difference before and after etching) of each wafer is between 0.1-0.5 g.
[0016] Put the monocrystalline silicon quasi-square sheet with a s...
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