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Excimer lamp

A technology for excimer lamps and luminous tubes, which is applied in the manufacture of discharge lamps, gas discharge lamps, and tube/lamp screens, can solve the problems of difficult operation and inability to use, and achieve the effect of preventing the reduction of fluoride.

Inactive Publication Date: 2009-07-01
USHIO DENKI KK
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0005] Also, as a fluorine source enclosed in the excimer lamp, F 2 It requires special equipment that will not be corroded or reacted with fluorine when it is generated or exhausted, and it is difficult to operate, so it cannot be used

Method used

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Embodiment Construction

[0033] use Figure 1 to Figure 19 One embodiment of the present invention will be described.

[0034] figure 1 It is a perspective view showing the excimer lamp of this embodiment, figure 2 (a) is from the figure 1 A cross-sectional view of the tube axis of the excimer lamp shown, figure 2 (b) is from figure 2 (a) A cross-sectional view viewed from the A-A section.

[0035] As shown in the above figure, the luminescent tube 2 of the excimer lamp 1 is formed in a straight tube shape, is transparent to light of 150 to 400 nm, and is made of a material that absorbs less fluorine ions. As the material of the luminous tube 2, for example, aluminum oxide (Al 2 o 3 ) metal oxides such as sapphire (single crystal alumina) or alumina (polycrystalline alumina) as the main component. Also, other materials such as magnesium difluoride (MgF 2 ), lithium fluoride (LiF), calcium difluoride (CaF 2 ), barium difluoride (BaF 2 ), fluoride such as YAG.

[0036] In addition, as the...

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Abstract

The present invention provides an excimer lamp which can provide high illumination with high illumination stability when the gas of sulfur hexafluoride, carbon tetrafluoride or nitrogen trifluoride with stable chemical property is used. The excimer lamp is enveloped with noble gas and fluoride. The external surface of light emitting diode is at least configured with one electrode (10, 11). The invention is characterized in that the gross pressure of gas in the light emitting diode (2) is larger than 13.3kPa. The fluoride is one object selected from sulfur hexafluoride, carbon tetrafluoride and nitrogen trifluoride. The molar ratio of fluoride relatively to the gross gas is 0.001%-10%. The noble gas is composed of a random gas and helium and / or neon, wherein the random gas is selected from argon, krypton and xenon. The molar ratio of helium and / or neon relatively to the whole mixture of noble gas is 90%-99.5%.

Description

technical field [0001] The present invention relates to an excimer lamp, in particular to an excimer lamp with electrodes arranged on the outer surface of a luminous tube. Background technique [0002] Conventionally, it has been known that a discharge vessel as a dielectric is filled with an appropriate light-emitting gas and a halogen, excimer molecules are generated by excimer discharge of the dielectric in the discharge vessel, and excimer light is emitted from the excimer molecules. molecular light. Excimer lamps are used, for example, as ultraviolet light sources for photochemical reactions. [0003] This kind of excimer lamp uses rare gas (argon, krypton, xenon, etc.) or a combination of rare gas and halogen (fluorine, chlorine, bromine, iodine, etc.) For example, a discharge gas composed of argon-fluorine emits light at 193nm, a discharge gas composed of krypton-fluorine emits light at 248nm, and a discharge gas composed of xenon-fluorine emits light at 351nm. The...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/12H01J61/30
CPCB01J19/123H01J5/50H01J9/20H01J61/125H01J61/16H01J61/35H01J65/00H01J65/04H01J65/046
Inventor 小田史彦森本幸裕
Owner USHIO DENKI KK
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