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Preparation method for Ti-Si-N nano-coating

A nano-coating, ti-si-n technology, applied in the direction of coating, superimposed layer plating, metal material coating process, etc., can solve the problem of easy falling off of the coating, achieve high production efficiency, good popularization and application Promising, low-cost effects

Inactive Publication Date: 2009-04-08
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a preparation method of Ti-Si-N nano coating, which solves the problem that the coating prepared by the existing reactive magnetron sputtering method is easy to fall off in the working environment, and realizes the metallurgical bonding between the transition layer and the coating , thereby improving the mechanical properties of the coating

Method used

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  • Preparation method for Ti-Si-N nano-coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] (1) Grinding, polishing and degreasing the surface of cermet tool;

[0021] (2) Put the pretreated cermet knives into the reaction furnace and evacuate to a vacuum degree -3 After Pa, introduce Ar gas to 5Pa, apply a negative bias voltage of 900V to the cermet tool, and use Ar ions to sputter and clean the cermet tool under the action of an electric field for 10 minutes;

[0022] (3) Ion nitriding treatment to adjust N 2 The flow ratio of Ar gas and Ar gas is 3:1, the total pressure in the reaction furnace is controlled to be 0.3Pa, the temperature in the reaction furnace is 400°C, the negative bias voltage of the cermet tool is 900V, and the nitriding time is 3 hours;

[0023] (4) Carry out arc light cleaning on the surface of the cermet tool after nitriding treatment, and the time is 4 minutes. Then turn on the Ti target, the Ti target current is 60A, and deposit the gradient TiN transition layer. 2 And the flow ratio of Ar gas is controlled as 2: 1, and the total p...

Embodiment 2

[0027] (1) Grinding, polishing and degreasing the surface of cermet tool;

[0028] (2) Put the pretreated cermet knives into the reaction furnace and evacuate to a vacuum degree -3 After Pa, pass Ar gas to 7Pa, apply a negative bias voltage of 850V to the cermet tool, and under the action of an electric field, use Ar ions to sputter clean the cermet tool for 13 minutes;

[0029] (3) Ion nitriding treatment. Adjust N 2 The flow ratio of Ar gas and Ar gas is 4:1, the total pressure in the reaction furnace is controlled to be 0.4Pa, the temperature in the reaction furnace is 450°C, the negative bias voltage of the cermet tool is 800V, and the nitriding time is 2.5 hours;

[0030] (4) Carry out arc light cleaning on the surface of the cermet tool after nitriding treatment, and the time is 5 minutes. Then turn on the Ti target, the Ti target current is 55A, and deposit the gradient TiN transition layer. 2 The flow ratio of Ar gas and Ar gas is controlled to be 2:1, the total pre...

Embodiment 3

[0034] (1) Grinding, polishing and degreasing the surface of cermet tool;

[0035] (2) Put the pretreated cermet knives into the reaction furnace and evacuate to a vacuum degree -3After Pa, introduce Ar gas to 10Pa, apply a negative bias voltage of 800V to the cermet tool, and use Ar ions to sputter and clean the cermet tool under the action of an electric field for 15 minutes;

[0036] (3) Ion nitriding treatment. Adjust N 2 The flow ratio of Ar gas and Ar gas is 4:1, the total pressure in the reaction furnace is controlled to be 0.5Pa, the temperature in the reaction furnace is 600°C, the negative bias voltage of the cermet tool is 600V, and the nitriding time is 2 hours;

[0037] (4) Carry out arc light cleaning on the surface of the cermet tool after ion nitriding treatment, and the time is 5 minutes. Then turn on the Ti target, the Ti target current is 40A, and deposit the gradient TiN transition layer. 2 The flow ratio of Ar gas and Ar gas is controlled to be 3:1, the...

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Abstract

The invention relates to a method for preparing a Ti-Si-N nano-coating and belongs to a method for preparing coatings for tool and mould. The method solves the problem of easy shedding of the coating in working conditions prepared by the existing method of reactive magnetron sputtering, and realizes metallurgical binding between a transition layer and the coating, thus improving the mechanical property of the coating. The method comprises the following steps of: (1) preheating; (2) sputter cleaning; (3) ion nitriding; (4) preparing the transition layer; and (5) preparing a surface layer. The method has the advantages of high production efficiency and low cost, the critical load Lc of the prepared coating and the substrate of a metal ceramic cutting tool is more than or equal to 65N, and the surface micro hardness HV is more than or equal to 3400. The method is suitable for manufacturing coating tools for low machinability materials, high speed dry-type milling stainless steel, iron-base super-alloy, high strength construction steel, wear-resistance cast steel, glass sealing alloy, and the like, and has good popularization and application prospect in manufacturing industries, such as automobile, aviation, space flight, resource equipment, and the like.

Description

technical field [0001] The invention belongs to the preparation method of tool and mold coating, in particular to a preparation method of Ti-Si-N nanometer coating. Background technique [0002] Coating tool and mold is to deposit superhard film material on the surface of tool and mold, which meets the requirements of modern manufacturing industry for tool and mold. With the globalization trend of manufacturing technology, the competition in the manufacturing industry has become more intense, and the emergence of high-speed machine tools has challenged traditional cutting tools. In order to meet the needs of high precision, automation, multi-functionality, high productivity, and environmental protection, cutting tools are required to be suitable for dry machining in addition to high temperature resistance, wear resistance, corrosion resistance, and high-speed cutting. Commonly used TiN coated tools cannot meet the further development of cutting technology due to their low h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C8/02C23C8/24C23C14/02C23C14/36
Inventor 熊惟皓刘文俊杨青青瞿峻叶大萌姚振华张修海陈文婷王小梅
Owner HUAZHONG UNIV OF SCI & TECH
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