Surface plasma resonance image-forming nanostructure array chip preparation method

Abstract

The invention relates to a preparation method of nanostructured array chip with surface plasma for resonance imaging. The preparation method is characterized by comprising the following steps: (1) selecting and cleaning a substrate; (2) using a vacuum evaporated coating to coat a first metal film on the substrate; (3) self-assembling a layer of polystyrene nanoparticles on the metal film; (4) coating a second metal film in a way of evaporation on the self-assembled layer so as to fill the gas between balls; (5) eliminating the nanoparticles with the Lift off technology; (6) using laser direct writing machine to manufacture a lattice mask plate of the level of micron; (7) adopting the photolithography to transmit the mask figure to the substrate; (8) acquiring the lattice figure through developing and stripping of photoresist; (9) using a chemical method to eliminate the excessive metal and photoresist; thus the metal lattice chip of the cyclical nanostructure can be formed. The method adopts the polystyrene nanoparticles for self-assembly so as to prepare the cyclical nanostructure, and thus is suitable for massive production of the nanostructure.

Description

technical field [0001] The invention relates to a surface plasmon resonance imaging lattice chip, in particular to a preparation method of a surface plasmon resonance imaging array chip with a metal nanostructure. Background technique [0002] Surface Plasmon Resonance (SPR) is a physical optical phenomenon in which incident light induces free electron resonance on the metal surface at the interface between the metal and the medium to generate surface charge electromagnetic waves. When the refractive index or thickness of the medium surface changes slightly When changing, the coupling condition of SPR is destroyed, causing the shift of the resonance peak. By measuring the change of the angle or intensity of the reflected light, the change of the refractive index of the medium surface can be obtained. At present, this technology is mainly used in the analysis of biomolecular interactions. Compared with traditional sensing methods such as ELISA and PCR, its main advantages are...

AI Technical Summary

Problems solved by technology

At present, there are usually two ways to prepare the dot arrays used for SPR image analysis. One is to use a method similar to DNA chip spotting on the surface of a continuous gold film. dot edge blur

Another way is to use a method similar to photolithography to directly prepare gold dot arrays, which avoids the problem of non-specific adsorption, but in terms of sensitivity, it can only be regulated by the thickness of the metal film layer.

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