Method for manufacturing high temperature uron commutative LiNbO3 optical waveguide

Abstract

The invention relates to an integrated optics waveguide producing domain, especially a LiNbO3 optical waveguide producing method of high temperature proton exchange. The waveguide with no phase change is produced on the lithium niobate substrate and the waveguide is mainly used for multiple-function chip of optic fiber gyroscope. The producing method comprises melting step, proton exchanging step, annealing step and antiproton exchanging step, wherein the proton exchanging step is performed at the temperature of 350 plus or minus 3 degree. In the method, the waveguide is composed of alpha phase of pure HxLi1-xNbO3. The said method has features of even and simple structure, good stability of waveguide, increased rate of finished products, induced impact of temperature contrast to substrate, prevention of pollution to the environment, reduced loss of device and reduced production cost.

Description

technical field [0001] The invention relates to the field of integrated optical waveguide production, in particular to a phase-change-free waveguide fabricated on a lithium niobate substrate, and the fabricated waveguide is mainly suitable for a multifunctional chip of an optical fiber gyroscope. Background technique [0002] When making optical waveguide, when titanium internal diffusion is used, the extraordinary refractive index and ordinary refractive index both increase, and both TE mode and TM mode can be guided. Due to LiNbO 3 The electro-optic coefficient is anisotropic. To make the modulation independent of polarization, the electrode structure is very troublesome, and the bandwidth cannot be increased. Therefore, for practical devices, use the highest electro-optic coefficient and corresponding polarization. But the other polarization is attenuated with a polarizer. However, to manufacture a polarizer with a high extinction ratio, the process parameters are stri...

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Problems solved by technology

The waveguide is a single-polarization waveguide, which has exactly the same polarization requirements as practical integrated optical devices. There is no need to make a polarizer, and the extinction ratio is high, but the proton exchange of annealed proton exchange (APE) is performed at a lower temperature. The diffusion ability of protons is weak, the small difference in surface cleanliness will affect the process, and the exchange time is short, so the properties of the final waveguide are more dispersed and the yield is low

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