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Ultra-alloy minitype heater and method for making

A production method and superalloy technology, which can be applied in ohmic resistance heating, heating element materials, electric heating devices, etc., and can solve problems such as reliability decline.

Inactive Publication Date: 2008-06-18
TOUCH MICRO SYST TECH
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  • Summary
  • Abstract
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  • Claims
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Problems solved by technology

[0005] In view of the problem that the known micro-heater faces the electromigration effect, resulting in a decrease in reliability, the object of the present invention is to provide a superalloy micro-heater, which includes a substrate, an insulating layer, and a superalloy material disposed on the insulating layer. The heating resistance and the contact electrode arranged on the heating resistance, in order to solve the insurmountable problems in the known technology

Method used

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  • Ultra-alloy minitype heater and method for making
  • Ultra-alloy minitype heater and method for making
  • Ultra-alloy minitype heater and method for making

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Embodiment Construction

[0021] In order to further understand the present invention, specific examples are listed below, together with descriptions such as illustrations and component symbols, to describe in detail the composition and effects of the present invention.

[0022] Please refer to Figure 1 to Figure 6 , Figure 1 to Figure 6 A schematic flow chart of the manufacturing method of the superalloy micro-heater according to the first preferred embodiment of the present invention. First, a substrate 10 and a superalloy sputtering target 12 are provided, and an insulating layer 14 is provided on the front surface of the substrate 10 . The substrate 10 used in this preferred embodiment is a silicon substrate, but it is not limited thereto. The superalloy sputtering target 12 can include nickel-based superalloy (Inconel), high nickel-based ratio superalloy (Nimonic), nickel-cobalt-based superalloy The sintered bodies of superalloy metals such as alloy (Incoloy), iron-based superalloy (Invar), nick...

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Abstract

The invention includes a superalloy micro-heater, comprising a basement, an insulating layer arranged on the front side of the basement, a patterned heating resistance arranged on the insulating layer and a contact electrode arranged on the heating resistance, wherein, the heating resistance which is made of superalloy material has the advantages of corrosion resistance, high resistance, fast temperature rising and high temperature resistance and can greatly enhance the reliability and repeatability of the superalloy micro-heater.

Description

technical field [0001] The invention relates to a micro-heating apparatus, in particular to a superalloy micro-heater made of superalloy material. Background technique [0002] MEMS (micro-electro mechanical system, MEMS) uses semiconductor process technology to manufacture micron (micro-meter, μm) level mechanical structures, and can integrate various components to form a micro system. Its products cover optics, Electronics, electrical machinery, materials, physics, chemistry, biomedicine and other fields are typical cross-field integrated technology products. [0003] Micro-heaters made by micro-electro-mechanical technology have been widely used in recent years, such as micro-heaters applied to the nozzles of inkjet printers. When a current is applied through the resistors of the micro-heaters, the ink in the nozzles will be heated instantly. to boiling, and immediately pushed and sprayed out from the nozzle for printing; this kind of micro-heater for heating can also be...

Claims

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Application Information

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IPC IPC(8): H05B3/12H05B3/20H05K13/00
Inventor 康育辅
Owner TOUCH MICRO SYST TECH
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