Preparation method of filling type sub-wavelength guide mode resonance optical filter

Abstract

The invention relates to a production method of a filling type subwavelength guided mode resonance light filtering piece. The initial air filling type subwavelength grating is produced by adopting methods of plate covering light charactering and reaction ion beam etching, then film plating and etching are proceeded by taking the air filling type subwavelength grating as the base piece. The invention is characterized in that: a) a film plating uses a method of physics vacuum sediment, the material of the film is the material being filled in a grating groove and the thickness of the film is 2 times of the depth of the subwavelength grating groove; b) the reaction ion beam is used for etching the light filtering piece being plated, the etching thickness is 2 times of the depth of the subwavelength grating groove. The invention fills the material, the thickness of which has the exactitude to the nanometer grade in the grating groove with nanometer yardstick and which no doubt is one of the production in the light filtering pieces with the most difficult. The invention combines the plating technique and the etching technique to provide a practical and feasible etching production method; the method used can conveniently produce filling type subwavelength guided mode resonance light filtering pieces.

Description

technical field [0001] The patent of the present invention relates to the preparation method of the filled sub-wavelength guided mode resonant filter, and specifically relates to the etching technology of the grating structure and the vacuum coating technology. Background technique [0002] The phenomenon of subwavelength guided mode resonance has been studied earlier, but it is still a hot physical problem in recent years. This physical phenomenon can be used to make sub-wavelength guided mode resonant filters. Compared with traditional thin-film filters, this type of filter has the following advantages: (1) extremely narrow bandwidth, which can theoretically reach 0.01nm; ( 2) Extremely high reflection, which can reach 100% in theory; (3) Few layers, single layer or two to three layers; (4) Thin film layer thickness error is not strict. With its incomparable advantages, subwavelength guided mode resonant narrowband filters attract more and more scientific researchers to e...

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Problems solved by technology

However, there are still no mature products of this type at home and abroad. The main reason is that it is difficult to prepare the filter with the designed structure under the actual process conditions, especially for the filled subwavelength guided mode resonant filter. Filler, since the groove width of the grating is on the order of nanometers, it is extremely difficult to fill the groove with a certain thickness of material once the air-filled grating is etched. So far, no filled subwavelength guide has been seen. Mode Resonance Filter Fabrication Reported

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