Controlled silicon structure used for CMOS electrostatic discharge protection
An electrostatic discharge protection, silicon structure technology, applied in circuits, electrical components, electrical solid devices, etc., can solve the problems of reduced integration and large device circuit area, and achieve the effect of meeting the needs of integration.
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[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0017] The thyristor structure used for CMOS electrostatic discharge protection in the present invention provides a novel SCR structure with bidirectional Snapback characteristics, such as figure 1 As shown, it can satisfy the requirement of CMOS electrostatic discharge protection and the requirement of integration degree at the same time. A deep N well is arranged vertically on the P-type substrate, and a second N well, a second P well, a first N well, a first P well, and a second N well are arranged in parallel on the deep N well along the lateral direction. The second P well and the first P well are respectively provided with a P+ region and an N+ region along the lateral direction, wherein the P+ region is close to the second N well, and the N+ region is close to the first N well, and each P+ region and N+ region are separated by field oxygen. In the st...
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