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Method for coating substrates with copper or silver

A coating and matrix technology, applied in the field of evaporation boats, can solve the problems of poor start-up performance and poor wetting, and achieve the effects of high coating uniformity, high evaporation power, and good start-up performance

Inactive Publication Date: 2008-04-30
ESK CERAMICS GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, said boats have the disadvantage that they have poor wetting of copper or silver and poor start-up behavior, so that frequent readjustments are required during the start-up phase

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0034] Example 1: (Plasma Sprayed Tungsten Coating for Copper Evaporation)

[0035] After the corresponding pretreatment of the surface, the conductive TiB 2 -BN-Mixed ceramics with dimensions 10 x 20 x 120mm 3 The evaporation boat is coated with a coating consisting of metallic tungsten. Tungsten metal powder with an average particle size of 25 μm (manufacturer eg H.C. starck in Goslar) is used for this purpose. A coating thickness of 125 μm was determined on a co-coated comparator by moving a polished abrasive disc across the cross-section of the comparator.

[0036] The evaporators thus coated were installed in a strip evaporation system and covered with approximately 5 g of copper wire pieces (diameter 2 mm) each. In closed equipment and reach -4 After the necessary vacuum degree of mbar, adjust the heating power to 4.68KW.

[0037] At about 60% of final power, the deposited copper begins to melt. As the temperature continues to rise, the copper begins to wet the coat...

example 2

[0040] Example 2: (Plasma sprayed WB coating for copper evaporation).

[0041] After corresponding pretreatment, the evaporation boats as described in Example 1 were coated with tungsten boride on the working surface. The composition of tungsten boride is nominally WB; Roentgen ray (x-ray) phase analysis of the tungsten boride used shows that it is mainly composed of WB together with about 5% by volume of W 2 B 5 composition. The coating thickness was likewise measured on a comparative piece coated at the same time, and the coating thickness averaged 120 μm.

[0042] The boat thus coated was loaded into a belt evaporation apparatus and heated to operating temperature as described in Example 1, together with the laid copper wire lengths. Compared to the boat described in Example 1, the tungsten boride-coated boat showed very good and uniform wetting of the coated work surface already at a lower power (corresponding to a lower temperature) .

[0043] With this evaporation b...

example 3

[0044] Example 3: (Plasma sprayed W-Cu-coating for copper evaporation)

[0045] After the corresponding surface pretreatment, the conductive TiB was given by plasma spraying method. 2 - Made of BN-AIN hybrid ceramics with dimensions 10×20×120mm 3 The evaporation boat is coated with a coating consisting of a mixture of metallic tungsten and 15% by volume copper. Tungsten metal powder (manufacturer eg H.C. Starck, Goslar) with an average particle size of 25 μm and electrolytic copper powder with an average particle size of 75 μm are used for this purpose. The two powder compositions were dried and homogenized for 12 hours on a roller platform using carbide balls before processing in the plasma spray equipment. After homogenization of the powder, care should be taken that the powder, which tends to separate / segregate due to large differences in specific gravity, does not become inhomogeneous due to shaking or vibration.

[0046] A coating thickness of 132 μm was determined on ...

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Abstract

The invention relates to a method for coating substrates with a metal selected among copper and silver by evaporating said metal with the aid of ceramic evaporator crucibles. The inventive method is characterized in that an evaporator crucible is used that is made of an electrically conductive ceramic material and whose surface from which the metal is evaporated is provided with one of the following coatings: a) a coating made of at least one transition metal of subgroup 4 to 6 of the periodic system and / or the borides thereof; b) a coating made of a mixture of the metal that is to be evaporated and at least one transition metal of subgroup 4 to 6 of the periodic system and / or the borides thereof; c) a first coating made of at least one transition metal of subgroup 4 to 6 of the periodic system and / or the borides thereof and a coating which is applied thereto and is made of the metal that is to be evaporated. The inventive evaporator crucibles are provided with good initial wetting power for copper and silver such that the evaporation process can be carried out uniformly and with little splashing.

Description

technical field [0001] The invention relates to a method for coating a substrate with copper or silver by evaporating the copper or silver using a ceramic evaporation boat and to an evaporation boat for this method. Background technique [0002] A commonly used method for coating flexible substrates with metals, especially aluminium, is the so-called high vacuum belt evaporation method. Therein, the substrate to be coated is guided over a cooled roller and is then exposed to aluminum vapor, which deposits as a thin metallic layer on the surface of the substrate. [0003] In order to generate the required constant steam flow, the ceramic evaporator, the so-called evaporation boat, is heated directly by electricity to approx. 1450°C. Continuously feed the aluminum wire to liquefy it on the ceramic surface, and in about 10 -4 mbar vacuum. A row of evaporation boats is arranged in the metallization / plating system in such a way that an aluminum layer of uniform thickness is de...

Claims

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Application Information

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IPC IPC(8): C23C14/14C23C14/26C23C14/24F27B14/10
CPCC23C14/243
Inventor D·朗格M·塞弗特
Owner ESK CERAMICS GMBH & CO KG
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