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Plasma resonant cavity waveguide assembly with heat insulating function

A plasma and waveguide device technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve problems affecting the effective service life of microwave generators, damage microwave generators and their supporting devices, etc., to achieve Easy to implement, enhance the effect of cutting off heat radiation, and facilitate the effect of modification

Active Publication Date: 2008-01-23
YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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AI Technical Summary

Problems solved by technology

Working for a long time under this condition will damage the microwave generator and its supporting devices, seriously affecting the effective service life of the microwave generator

Method used

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  • Plasma resonant cavity waveguide assembly with heat insulating function

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Embodiment Construction

[0010] Further illustrate the embodiment of the present invention below in conjunction with accompanying drawing, comprise microwave generator 1, be equipped with automatic tuner in the microwave generator, microwave generator and rectangular waveguide 2 one ends join, rectangular waveguide comprises the rectangular waveguide that is arranged horizontally and A rectangular waveguide that is vertically bent and extended upwards. The cross section of the rectangular waveguide is rectangular. Below the vertically arranged rectangular waveguide, there is a heat shield 8 that traverses the cross section of the waveguide inner cavity. The heat shield is made of high temperature resistant non-metallic material, and can be selected Aluminum silicate refractories or ceramic materials with a metal impurity content of less than 0.01% are used to cut off heat radiation without affecting the transmission of microwaves. The cross-sectional shape and size are the same, and the heat shield can...

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Abstract

The invention relates to a plasma resonator waveguide device with heat insulation function used for a PCVD optical fiber preform machining tool. The invention comprises a microwave generator, a wave guide and a plasma resonator; wherein, the microwave generator is conducted with the plasma resonator through the wave guide; the plasma resonator is arranged inside a heating furnace; the difference lies in that the waveguide internal cavity channel is provided with a heating separator. The invention can effectively prevent the heat radiation from entering into the microwave generator through the waveguide device without affecting the transmission of the microwave, which avoids the overheated state of the microwave generator and makes the microwave generator operate under a relative lower temperature, thus enhancing the service life of the microwave generator and the components thereof. The plasma resonator waveguide system is capable of working for longer time under a larger power, and further improves the effect of the PCVD process. The invention is simple in structure, easy to operation and convenient to refit the existing equipment.

Description

technical field [0001] The invention relates to a plasma resonant cavity waveguide device with heat insulation function for a PCVD optical fiber preform processing machine tool, which is an improvement on the existing plasma resonant cavity waveguide device. Background technique [0002] PCVD, or plasma chemical vapor deposition, is one of the main processes for processing optical fiber preforms. The processing mechanism of the PCVD process is the direct action of high-frequency microwaves on low-pressure mixed reactant gases, causing rapid physical and chemical reactions to form pure carbon dioxide. Silicon or doped silicon dioxide is deposited directly in the glassy state on the inner wall of the quartz tube. The PCVD process has the characteristics of flexibility and precision, and the plasma resonator microwave system is the core part of the PCVD processing equipment. The plasma resonant cavity microwave system consists of three parts: plasma resonant cavity, microwave ...

Claims

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Application Information

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IPC IPC(8): C23C16/50
Inventor 李震宇雷高清卢松涛李德祥
Owner YANGTZE OPTICAL FIBRE AND CABLE JOINT STOCK LIMITED COMPANY
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