Great diameter SiC monocrystal cutting method
A cutting method and large-diameter technology, which is applied in metal processing and other directions, can solve the problems of not being suitable for cutting SiC single crystals, etc., and achieve the effects of small warpage, shallow knife marks, and small damage
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Embodiment 1
[0024] A method for cutting large-diameter SiC single crystals, using the RTS440 wire cutting machine produced in the United States, using a diamond cutting wire with a diameter of 250 μm, and its slit width is 275 μm. inch, SiC single crystal rod with a thickness of 15mm.
[0025] The specific cutting steps are as follows:
[0026] (1) Adjust the level: first adjust the cutting machine to be in a horizontal state before operation;
[0027] (2) Winding: Put the diamond cutting wire on the winding wheel, then go around the tensioning wheel and the guide wheel, so that the diamond wire passing through the winding wheel, tensioning wheel, and guiding wheel is on the same plane, and make the wire Uniform distribution of upper tension;
[0028] (3) Install the SiC crystal to be cut: bond the SiC single crystal rod to be cut on the special base, adjust the cutting direction and range, and fix the base on the workpiece table;
[0029] (4) Determine parameters: determine wafer thic...
Embodiment 2
[0034] The cutting method, specific cutting steps and average slicing speed are the same as in Example 1. A diamond wire with a wire diameter of 450 μm is used to cut a SiC single crystal rod with a thickness of 15 mm. The slit width is 475 μm, and 12 SiC wafers with a thickness of 0.7 mm can be cut. , the warpage of each piece is less than 30μm, and the thickness unevenness TTV is less than 25μm.
Embodiment 3
[0036] The cutting method, specific cutting steps and average slicing speed are the same as in Example 1. A diamond wire with a wire diameter of 150 μm is used to cut a SiC single crystal rod with a thickness of 15 mm. The slit width is 175 μm, and 17 SiC wafers with a thickness of 0.7 mm can be cut. , the warpage of each piece is less than 30μm, and the thickness unevenness TTV is less than 25μm.
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