Quasi-molecule laser electrochemical microstructure manufacturing method and equipment

Abstract

The invention belongs to micro manufacturing field, pointing to the deficiency of traditional method, the quasimolecule laser, integrated circuit producing and etching, electric chemical and scanning probe micro technology are integrated together into a new process method. The steps are: (1) produces micro probe array at first; (2) the base is fixed between the plane electrode and the micro probe array, generates the negative voltage, pours in the protection gas; (3) adds in voltage between the two polars after pouring the electrolyte liquid, at the same time, the quasimolecule laser are poured in to control the electrochemical reaction, completes the process. the correspondent device sets an electrochemical reaction room on the laser microprocess machine platform, it includes a laser air moving window, an inlet of protection air, a vacuum pump interface, an electrolyte liquid inlet, a microprobe array, a plane electrode, an assistant electrochemical reaction air inlet and the waste outlet. The invention can acquires microstructure with width-depth ratio 5-50, the character size 1-50 micro meter on the semiconductor base.

Description

technical field [0001] The invention belongs to the field of micro-manufacturing in manufacturing technology, and relates to integrated circuit plate-making photolithography, excimer laser processing and electrochemical processing techniques. Background technique [0002] The current micro-manufacturing method generally adopts a photolithography process to apply glue on a substrate to form a microstructure pattern, and then uses a chemical micromachining process or a laser-induced chemical micromachining process to fabricate a three-dimensional microstructure. However, since the longitudinal etching depth and lateral etching width of the microstructure formed by the chemical micromachining process are basically equal (the aspect ratio is 1), it is difficult to produce a microstructure with a large vertical depth and a small lateral width, and unnecessary "The Lateral Corrosion Problem". Laser-induced chemical micromachining can reduce harmful lateral corrosion effects and i...

AI Technical Summary

Problems solved by technology

However, the lasers used in the existing laser-induced electrochemical micromachining process have longer wavelengths (such as 1.06 microns or 442 nanometers) and low power (such as 4.5 milliwatts), and it is difficult for the machinable feature size to reach the submicron scale. And the scope of application is still very limited

For example, the patented technology of the University of California in the United States is only applicable to the etching of III-nitride (such as gallium nitride) thin films, and it is powerless to submicron processing of other materials

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