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Film layer removal slurry, solar cell cutting method and semiconductor device scribing method

A technology of solar cell and cutting method, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of material residue and affecting cell efficiency, etc.

Inactive Publication Date: 2021-09-10
ANHUI HUASUN ENERGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome defects such as material residues at the incision and affecting battery efficiency when cutting the transparent conductive film (TCO) of solar cells in the prior art, thereby providing a film removal slurry Materials, cutting methods of solar cells, scribing methods of semiconductor devices

Method used

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  • Film layer removal slurry, solar cell cutting method and semiconductor device scribing method
  • Film layer removal slurry, solar cell cutting method and semiconductor device scribing method
  • Film layer removal slurry, solar cell cutting method and semiconductor device scribing method

Examples

Experimental program
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Effect test

Embodiment 1

[0086] The present embodiment provides a cutting method of a solar battery sheet, comprising the following steps:

[0087] (1) Apply film layer removal slurry on the area to be cut on the surface of the transparent conductive film layer of the solar cell, and allow it to fully react for 1 min to form an ITO-free area.

[0088] In this step, it is preferable to coat the film layer removal slurry on the first transparent conductive film layer. Wherein, the composition of the film layer removal slurry includes the following components in volume percentage, phosphoric acid 5%; hydrofluoric acid 25%; terpineol 55%; polyamide wax 5%; polystyrene 10%. Screen printing technology was used to coat the film layer to remove the slurry, the coating thickness was 10 μm, and the coating width was 600 μm.

[0089] (2) drying and sintering to remove the residual film layer and remove the slurry.

[0090] Wherein, the temperature of drying and sintering is 170° C., and the time is 6 minutes. ...

Embodiment 2

[0094] The present embodiment provides a cutting method of a solar battery sheet, comprising the following steps:

[0095] (1) Apply film layer removal slurry on the area to be cut on the surface of the transparent conductive film layer of the solar cell, and allow it to fully react for 1 min to form an ITO-free area.

[0096] In this step, it is preferable to coat the film layer removal slurry on the first transparent conductive film layer. Wherein, the composition of the membrane layer removal slurry includes the following components in volume percentage: 5% phosphoric acid; 25% hydrofluoric acid; 45% terpineol; 10% polyamide wax; 15% polystyrene. Screen printing technology was used to coat the film layer to remove the slurry, the coating thickness was 15 μm, and the coating width was 800 μm.

[0097] (2) drying and sintering to remove the residual film layer and remove the slurry.

[0098] Wherein, the temperature of drying and sintering is 190° C., and the time is 6 minu...

Embodiment 3

[0102] The present embodiment provides a cutting method of a solar battery sheet, comprising the following steps:

[0103] (1) Apply film layer removal slurry on the area to be cut on the surface of the transparent conductive film layer of the solar cell, and allow it to fully react for 1 min to form an ITO-free area.

[0104] In this step, it is preferable to coat the film layer removal slurry on the first transparent conductive film layer. Wherein, the composition of the film layer removal slurry includes the following components in volume percentage, phosphoric acid 5%; hydrofluoric acid 25%; terpineol 50%; polyamide wax 7%; polystyrene 13%. Screen printing technology was used to coat the film layer to remove the slurry, the coating thickness was 12 μm, and the coating width was 1000 μm.

[0105] (2) drying and sintering to remove the residual film layer and remove the slurry.

[0106] Wherein, the temperature of drying and sintering is 180° C., and the time is 6 minutes....

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Abstract

The invention belongs to the technical field of semiconductor device preparation, and particularly relates to a film layer slurry removal method, a solar cell cutting method and a semiconductor device scribing method. The film layer removal slurry comprises, by volume, 2-10% of a medium-strong acid; 10-30% of a weak acid; 40-70% of a solvent; 5-20% of an auxiliary agent; and 5-15% of resin, wherein the sum of the volume percentages of the components is 100%. The solar cell cutting method comprises the following steps: coating a to-be-cut area on the surface of a transparent conductive film layer with a film layer to remove slurry so as to form a film-layer-free area; drying and sintering, and removing the residual film layer and slurry; and carrying out laser cutting on the film-free area. The transparent conductive film layer is selectively removed by coating the corrosion slurry, and the blank area is formed on the edge of the transparent conductive film layer; and the residual corrosion slurry can be removed in an inherent drying and sintering step in a battery piece manufacturing process, an additional slurry cleaning step does not need to be introduced, and the method has the advantages of low cost, simple process, high production efficiency and the like.

Description

technical field [0001] The invention belongs to the technical field of semiconductor device preparation, and in particular relates to a film layer removal slurry, a cutting method of a solar battery sheet, and a scribing method of a semiconductor device. Background technique [0002] At present, photovoltaic power generation technology, as the mainstream technology for utilizing solar energy resources, is an important field for the development of green energy, and has moved towards marketization and commercialization. With the continuous advancement of technology, half-cut photovoltaic modules and laminated photovoltaic modules have developed rapidly in recent years. Both half-cut photovoltaic modules and laminated photovoltaic modules need to cut solar cells during production. The existing slicing methods include laser cutting and mechanical cutting. Or use laser cutting first and then mechanical cutting lobes, etc. [0003] Solar cell cutting is an important process in th...

Claims

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Application Information

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IPC IPC(8): C09K13/08H01L21/3213H01L31/18
CPCC09K13/08H01L21/32134H01L31/1888Y02P70/50Y02E10/50
Inventor 徐晓华辛华伟符欣张良周肃龚道仁王文静陈梦滢
Owner ANHUI HUASUN ENERGY CO LTD
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