Micro-nano fiber-waveguide-superconducting nanowire single photon detector and its preparation method
A single-photon detector and superconducting nanowire technology, applied in the field of photoelectric detection, can solve problems such as difficult optimization of high-performance indicators of single-photon detectors, and achieve the effects of improving light transmission efficiency, low time jitter, and high detection efficiency
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[0060] In view of the problems existing in the prior art, the present invention provides an integrated micro-nano fiber-waveguide-superconducting nanowire single-photon detector and preparation method, so as to realize low dark count, high speed, low time jitter and high efficiency of the single-photon detector .
[0061] like figure 1 , this embodiment provides a preparation method of a micro-nano fiber-waveguide-superconducting nanowire single-photon detector. In this embodiment, only an SOI substrate is used as an example to correspondingly prepare a single-photon detector based on a silicon waveguide. , but the type of the substrate and the type of the formed waveguide are not limited thereto, and the specific types of the substrate and the formed waveguide are not excessively limited here. As when using the SOI substrate, the waveguides are SOI waveguides, but the waveguides can also be eg SiN waveguides, GaS waveguides, AlN waveguides, LiNbO 3 One of the waveguides or ...
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