Ultraviolet LED and method of making the same
A production method and ultraviolet technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve problems such as expanding and increasing the demand for ultraviolet LEDs, and achieve improved radiation recombination efficiency, reduced quantum-confined Stark effect, and high luminescence efficiency effect
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Embodiment 1
[0070] Specifically, as Figure 5 As shown, the UV LED sequentially includes: a substrate 60, an AlN buffer layer 61, an AlN / AlGaN stress release layer 62, an n-AlGaN electron supply layer 63, a light-emitting layer 70, an AlGaN blocking layer 64, and a p-AlGaN hole supply layer 65. a GaN ohmic contact layer 66, wherein the light emitting layer 70 includes 2 to 12 stacked units 71, and the first stress balance layer 712 in each of the stacked units 71 is In x Ga 1-x N stress balance layer, the second stress balance layer 715 is In x Ga 1-x N stress balance layer, the first quantum barrier layer 711 is Al a Ga 1-a N quantum barrier layer, the second quantum barrier layer 713 is Al a Ga 1-a N quantum barrier layer, the first quantum well layer 714 is Al b In c Ga 1-b-c N quantum well layer, the second quantum well layer 716 is Al b In c Ga 1-b-c N quantum well layer.
Embodiment 2
[0072] Specifically, as Image 6 As shown, the UV LED sequentially includes: a substrate 80, an AlN buffer layer 81, an AlN / AlGaN stress release layer 82, an n-AlGaN electron supply layer 83, a light-emitting layer 90, an AlGaN blocking layer 84, and a p-AlGaN hole supply layer 85. , GaN ohmic contact layer 86, wherein the light emitting layer 90 includes 2 to 12 stacked units 91, and the first stress balance layer 912 in each of the stacked units 91 is a GaN stress balance layer, and the second stress balance layer 915 is a GaN stress balance layer, and the first quantum barrier layer 911 is Al a Ga 1-a N quantum barrier layer, the second quantum barrier layer 913 is Al a Ga 1-a N quantum barrier layer, the first quantum well layer 914 is Al b In c Ga 1-b-c N quantum well layer, the second quantum well layer 916 is Al b In c Ga 1-b-c N quantum well layer.
[0073]It should be noted that, in the ultraviolet LEDs provided in the first and second embodiments, the latti...
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