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Preparation method of C-doped TiAlSiN coating

A technology of coating and composite coating, which is applied in the field of preparation of C-doped TiAlSiN coating, can solve problems such as weak anti-adhesion, high internal stress and low internal stress of TiAlSiN coating, so as to improve cutting life and improve Effects of internal structure and surface quality, and excellent cutting life

Pending Publication Date: 2021-05-28
SHANGHAI INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Aiming at the problems of high internal stress and weak anti-adhesion of TiAlSiN coating, the present invention provides a preparation method of C-doped TiAlSiN coating, which uses C-doped TiAlSiN coating assisted by low-energy particle bombardment , the coating of this method has low internal stress, good anti-adhesion, excellent oxidation resistance, superhardness and wear resistance

Method used

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  • Preparation method of C-doped TiAlSiN coating

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Embodiment 1

[0023] The embodiment of the present invention discloses a preparation method of C-doped TiAlSiN coating, such as figure 1 shown, including the following steps:

[0024] (1) Put the pretreated substrate into a vacuum chamber and heat it to 450°C for 20 minutes to heat the center and surface of the substrate evenly. The substrate can be high-speed steel;

[0025] (2) Vacuum degree of 0.5Pa, substrate bias voltage -800V, pass through 200sccm Ar, Ti, AlTi and TiSi targets and clean them against the baffles in sequence for 4-8 minutes under 120A current to remove impurities on the target surface;

[0026] (3) The self-cleaning Ti target is connected to a 120A current, 200sccm of Ar is passed through, the vacuum degree is 0.5pa, and the substrate is etched for 6-7min under a bias voltage of -650 to -750V to remove the oxide skin on the surface of the substrate and achieve surface activation. At the same time, a mixed layer is formed between Ti and the substrate, which enhances the...

Embodiment 2

[0039] The embodiment of the present invention discloses a method for preparing a C-doped TiAlSiN coating, comprising the following steps:

[0040] (1) Put the pretreated substrate into a vacuum chamber and heat it to 450°C for 20 minutes to heat the core and surface of the substrate evenly. The substrate can be cemented carbide, such as tungsten-cobalt, tungsten-titanium-cobalt, etc.;

[0041] (2) Vacuum degree of 0.5Pa, substrate bias voltage -800V, pass through 200sccm Ar, Ti, AlTi and TiSi targets and clean them against the baffles in sequence for 4-8 minutes under 120A current to remove impurities on the target surface;

[0042] (3) The self-cleaning Ti target is connected to a 120A current, 200sccm of Ar is passed through, the vacuum degree is 0.5pa, and the substrate is etched for 6-7min under a bias voltage of -650 to -750V to remove the oxide skin on the surface of the substrate and achieve surface activation. At the same time, a mixed layer is formed between Ti and t...

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Abstract

The invention discloses a preparation method of a C-doped TiAlSiN coating. A Ti gradient composite coating, a TiN gradient composite coating, a TiAlN gradient composite coating, a TiAlSiN gradient composite coating and a TiSiCN gradient composite coating are sequentially included. The preparation method of the TiSiCN layer comprises the following steps that the temperature is 420 DEG C, the flow of N2 ranges from 160 sccm to 200 sccm, the flow of C2H2 ranges from 12 sccm to 48 sccm, the vacuum degree ranges from 3.5 pa to 4.2 pa, the substrate bias voltage ranges from -60 V to -80 V, the TiSi target current ranges from 140 A to 160 A, the deposition time ranges from 20 min to 25 min, and the TiSiCN gradient layer with the C content gradually increased is obtained. According to the C-doped TiAlSiN coating, the cutting life of the TiAlSiN coating can be effectively prolonged, and the surface quality of a machined workpiece can be effectively improved.

Description

technical field [0001] The invention belongs to the technical field of coated cutting tools, and in particular relates to a preparation method of a C-doped TiAlSiN coating. Background technique [0002] With the continuous development of industry and the improvement of performance requirements for parts, machining tools are facing new challenges again. It has become a hot spot for industrial development to seek coated tools that can not only adapt to high-temperature processing environments but also cut high-hard materials. In addition, in order to obtain workpieces with excellent surface quality, anti-adhesion coated tools have also become a key breakthrough technology. [0003] As a classic superhard nitride coating, TiAlSiN coating tool has excellent oxidation resistance and wear resistance, and is widely used in processing stainless steel and superalloys, and has good cutting performance. However, due to its impact on machining The anti-adhesion of the material is weak ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/06C23C14/16C23C14/58
CPCC23C14/325C23C14/0021C23C14/0664C23C14/16C23C14/0641C23C14/5833
Inventor 黄彪张而耕周琼
Owner SHANGHAI INST OF TECH
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