Ceramic substrate green tape and manufacturing method and device thereof

Abstract

The invention relates to a ceramic substrate green tape and a manufacturing method and device thereof. The method comprises the following steps: 1) paving ceramic slurry according to a design size, wherein the ceramic slurry is tiled in a single layer; and 2) performing constant-temperature and constant-humidity in-situ curing on the ceramic slurry in an inert atmosphere to obtain the ceramic substrate green tape. The technical problem to be solved is how to improve the production efficiency of the ceramic substrate green tape, and the single-machine production efficiency of the ceramic substrate green tape is improved to three times. Moreover, the thickness tolerance of the ceramic substrate green tape prepared by the technical scheme is + / -5%, and the density tolerance is + / -0.05 g / cm<3>, i.e., the quality consistency of the product is good. Furthermore, the thickness of the ceramic substrate green tape can be adjusted, the breadth of the ceramic substrate green tape can reach 600 mm, the length of the ceramic substrate green tape can reach 3 m, and the large-size ceramic substrate green tape can be produced, so that the ceramic substrate green tape is more practical.

Description

technical field [0001] The invention belongs to the technical field of ceramic manufacturing, and in particular relates to a green ceramic substrate tape and a manufacturing method and device thereof. Background technique [0002] With the development of electronic systems such as modern aerospace, communication, computer data processing, and military engineering towards small, light weight, high performance, and high reliability, thin-film circuits are required to have higher precision, smaller wire gaps, and dimensional tolerances, etc. Excellent characteristics. As a key substrate material for thin film circuits, more stringent requirements are put forward for the related characteristics of sheet ceramics, such as flatness, surface finish, and quality consistency. [0003] The methods for producing sheet-shaped ceramics mainly include dry pressing, tape casting, film rolling and gel injection molding. Among them, gel injection molding is the early 1990s in Oak Ridge Sta...

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Problems solved by technology

[0004] However, in the prior art, the sheet-like ceramics prepared by the gel casting method adopt a multi-layer combined mold, which is poured and solidified from the upper or lower end of the mold, which has complex assembly process, limited product size and thickness, large product quality deviation and high production efficiency. Problems such as low level, difficulty in preparing large-size sheet ceramics, etc., cannot meet the production requirements of large quantities and high quality

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