Niobium-based planar multi-superconducting quantum bit and preparation method and application thereof

Abstract

The invention provides a niobium-based planar multi-superconducting quantum bit which comprises a substrate and a metal niobium film arranged on the substrate. A superconducting circuit is etched on the surface of the metal niobium film, and one or more Josephson junctions are prepared. The invention also provides a preparation method and application thereof. According to the present invention, the planar multi-superconducting quantum bit with the niobium substrate as the substrate is successfully obtained, and the problems existing in the technology for preparing the superconducting quantum bit through the aluminum substrate are solved. Tests of Institute of Physics of Chinese Academy of Sciences show that the performance of the multi-quantum bit obtained by the process reaches the corresponding level in the world. The niobium-based planar multi-superconducting quantum bit can be further applied to the calculation and simulation of superconducting quantum calculation on scientific problems and a three-dimensional processing technology of superconducting quantum bits.

Description

technical field [0001] The invention belongs to the field of superconducting quantum, and in particular relates to a niobium-based planar multi-superconducting qubit and its preparation method and application. Background technique [0002] Superconducting quantum computing is a research topic that is widely concerned in the world. In recent years, many literatures have reported the research and simulation of specific physical processes using superconducting qubits. In some recent works, its application scope has exceeded physics. The scope of research has also achieved good results in the fields of chemistry and informatics. Our country has also attracted enough attention at the national strategic level. As the core superconducting quantum chip of superconducting quantum computing, it can be said that its preparation process and technology are the key to the success of superconducting quantum computing, and the key performance parameter of superconducting qubits is its deco...

AI Technical Summary

Problems solved by technology

[0005] 1. In the subsequent (electron beam exposure) process, an alignment mark composed of a gold film must be grown on a special position on the superconducting qubit, which increases the cost of preparation and the complexity of the process itself

[0006] 2. Metal aluminum is relatively easy to react with oxygen in the air to form an oxide layer that is not conducive to the performance of superconducting qubits

[0007] 3. The material of metal aluminum is relatively soft, and it is easy to fall off or scratch in the subsequent processing technology, which leads to the failure of the superconducting qubit processing process

[0008] 4. The process of using metal aluminum to prepare superconducting qubits requires the use of highly toxic gas chlorine as a process gas, which greatly increases technical risks

The alternative process of avoiding the use of chlorine must also use the method of chemical corrosion. This method also has certain harm to the process implementer and the conditions are unstable and the repeatability is poor.

[0009] 5. In the three-dimensional packaging process that further expands the number of superconducting qubits, metal aluminum will form an alloy layer with metal indium, which will affect the performance of superconducting qubits and the success rate of the three-dimensional packaging process

[0010] 6. The chemical properties of metal aluminum are relatively active, which can react with most of the necessary photolithography developer (alkaline) in the process of preparing superconducting qubits, which leads to the failure of superconducting qubit processing

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