Synthesis and purification method of arsine

Abstract

The invention relates to a synthesis and purification method of arsine. The method comprises the following steps: 1. putting zinc powder and arsenic powder into a quartz vessel, uniformly mixing, putting into a stainless steel reaction tank, vacuumizing, introducing high-purity inert gas, and pressurizing and heating to obtain zinc arsenide powder; 2, putting the zinc arsenide powder into a reactor, and adding dilute sulfuric acid to react to generate crude arsine gas; 3, introducing the crude arsine gas into an adsorption device to obtain arsine gas; 4, arsine gas is captured through a liquidnitrogen cold trap, the arsine gas is condensed into liquid arsine, non-condensable gas is pumped out through a vacuum pump, a liquid nitrogen tank outside the cold hydrazine is taken down, arsine isvolatilized, and pure arsine gas is obtained; and 5, introducing the pure arsine gas into a pre-treated clean steel cylinder for storage to obtain a finished product. Impurities in arsine gas can beeffectively reduced, the purity of arsine is improved, and meanwhile, the addition of an adsorbent and the selection of a molecular sieve are carried out in one device, so that the reaction efficiencycan be improved.

Description

technical field [0001] The invention relates to the technical field of arsine synthesis, in particular to an arsine synthesis and purification method. Background technique [0002] Arsane is one of the very important Group V elements in electronic gases. Arsane is an important electronic special gas. It is mainly used in the semiconductor industry for N-type doping of epitaxial silicon, N-type diffusion in silicon, ion Implantation and growth of gallium arsenide and gallium arsenide phosphide, etc. In addition, arsine also has extremely important applications in optoelectronics, solar cells, and microblogging devices. [0003] Arsane cannot be synthesized simply by a single substance, but it can be obtained in the presence of a catalyst or under plasma irradiation. Usually, some metal arsenides are used to react with water or acid to prepare arsine. The reaction is fast and complete, and the product is Hydrogen is completely free, but the yield of arsine is usually less th...

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Problems solved by technology

[0005] At present, there are also published arsine purification methods in China, which mainly use gallium-indium alloy liquid deep adsorption dehydration and oxygen to obtain electronic-grade arsine. However, this adsorption method is not renewable, and heavy metals are difficult to obtain, resulting in a high cost of the entire system. , the promotion is limited, on the other hand, these heavy metal alloys are inherently toxic, and the adsorption efficiency of deep adsorption is low

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