Waste ammonia gas recovery device for gallium nitride production furnace

A recovery device, gallium nitride technology, applied in the chemical industry, climate sustainability, air quality improvement, etc., can solve the problem of insufficient ammonia recovery, ineffective use of ammonia heat, and exhaust gas that does not meet the specified emission standards and other problems to achieve the effect of improving the efficiency of recycling

Active Publication Date: 2020-12-15
WUXI RES INST OF APPLIED TECH TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies in the prior art, the present invention provides a waste ammonia gas recovery device for gallium nitride production furnaces, which solves the problem that the existing waste ammonia gas recovery devices for gallium nitride production furnaces do not recover enough ammonia gas, and the discharged waste gas contains Failure to meet the specified emission standards, the problem that the heat of ammonia gas has not been effectively used

Method used

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  • Waste ammonia gas recovery device for gallium nitride production furnace
  • Waste ammonia gas recovery device for gallium nitride production furnace
  • Waste ammonia gas recovery device for gallium nitride production furnace

Examples

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Embodiment 1

[0031] A waste ammonia gas recovery device for a gallium nitride production furnace, comprising a heat recovery box 1, an ammonia gas recovery box 2, a liquid pump 3, and a liquid storage box 4. The left side of the heat recovery box 1 is connected to an intake pipe 5 for heat recovery The bottom of the inner cavity of the box 1 is fixedly connected with a No. 1 mechanical box 6, and the bottom of the No. 1 mechanical box 6 inner cavity is fixedly connected with a suction fan 7. The suction fan 7 includes a motor, a rotating shaft and fan blades. The power supply is electrically connected. The left side of the No. 1 mechanical box 6 is connected to a No. 1 exhaust pipe 8. The bottom of the inner cavity of the heat recovery box 1 is fixedly connected to the left side of the No. 1 mechanical box 6. The compressor 9 is connected to the The external power supply is electrically connected, the back of the inner cavity of the heat recovery box 1 is fixedly connected with the heat pre...

Embodiment 2

[0033] A waste ammonia gas recovery device for a gallium nitride production furnace, comprising a heat recovery box 1, an ammonia gas recovery box 2, a liquid pump 3, and a liquid storage box 4. The left side of the heat recovery box 1 is connected to an intake pipe 5 for heat recovery The bottom of the inner cavity of the box 1 is fixedly connected with a No. 1 mechanical box 6, and the bottom of the No. 1 mechanical box 6 inner cavity is fixedly connected with a suction fan 7. The suction fan 7 includes a motor, a rotating shaft and fan blades. The power supply is electrically connected. The left side of the No. 1 mechanical box 6 is connected to a No. 1 exhaust pipe 8. The bottom of the inner cavity of the heat recovery box 1 is fixedly connected to the left side of the No. 1 mechanical box 6. The compressor 9 is connected to the The external power supply is electrically connected, the back of the inner cavity of the heat recovery box 1 is fixedly connected with the heat pre...

Embodiment 3

[0035] A waste ammonia gas recovery device for a gallium nitride production furnace, comprising a heat recovery box 1, an ammonia gas recovery box 2, a liquid pump 3, and a liquid storage box 4. The left side of the heat recovery box 1 is connected to an intake pipe 5 for heat recovery The bottom of the inner cavity of the box 1 is fixedly connected with a No. 1 mechanical box 6, and the bottom of the No. 1 mechanical box 6 inner cavity is fixedly connected with a suction fan 7. The suction fan 7 includes a motor, a rotating shaft and fan blades. The power supply is electrically connected. The left side of the No. 1 mechanical box 6 is connected to a No. 1 exhaust pipe 8. The bottom of the inner cavity of the heat recovery box 1 is fixedly connected to the left side of the No. 1 mechanical box 6. The compressor 9 is connected to the The external power supply is electrically connected, the back of the inner cavity of the heat recovery box 1 is fixedly connected with the heat pre...

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Abstract

The invention discloses a waste ammonia gas recovery device for gallium nitride production furnace. The device comprises a heat recovery box, an ammonia gas recovery box, a liquid suction pump and a liquid storage box; the right side of the liquid suction pump communicates with a liquid suction pipe, the top of the liquid suction pump is fixedly connected with a liquid conveying pipe, and the right side of an inner cavity of a mixed absorption layer is fixedly connected with a third mechanical box. And the left side of the inner cavity of the mixed absorption layer is fixedly connected with amixing pool, and the bottom of an inner cavity of the third mechanical box is fixedly connected with a sucking pump. The invention relates to the technical field of waste gas recovery. According to the waste ammonia gas recovery device for the gallium nitride production furnace, through the arrangement of the mixing pool and the air pump, when the waste ammonia gas recovery device for the galliumnitride production furnace is used, the waste ammonia gas can be effectively absorbed through the cooperation of the air pump and the air suction pipe, and the fusion of the waste ammonia gas and a dilute sulfuric acid solution is improved through the cooperation of the gas-liquid mixing pipe; the recycling efficiency of the waste ammonia gas is improved, and the problem that the ammonia gas is not sufficiently recycled is solved.

Description

technical field [0001] The invention relates to the technical field of waste gas recovery and utilization, in particular to a recovery device for waste ammonia gas from a gallium nitride production furnace. Background technique [0002] Gallium nitride is a compound of nitrogen and gallium, a semiconductor with a direct energy gap, commonly used in light-emitting diodes. The structure of this compound is similar to wurtzite, and its hardness is very high. Gallium nitride has a very wide energy gap of 3.4 electron volts, and can be used in high-power, high-speed optoelectronic components. For example, gallium nitride can be used in violet laser diodes, and can be used in non-linear semiconductor pumped solid-state lasers. Under certain conditions, a violet laser is produced, and ammonia gas will be produced in the production of gallium nitride. Ammonia gas is a colorless gas with a strong pungent smell and is easily liquefied into a colorless liquid. It can be liquefied und...

Claims

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Application Information

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IPC IPC(8): B01D53/78B01D53/58
CPCB01D53/78B01D53/58B01D2251/506Y02A50/20
Inventor 周德金黄伟朱健吴超闫大为许剑
Owner WUXI RES INST OF APPLIED TECH TSINGHUA UNIV
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