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Method for preparing aluminum oxide coating by modulating high-current pulsed arc

A technology of alumina coating and strong current pulse, applied in coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of poor surface conductivity of target material, aggregation of aluminum arc spot movement, affecting coating quality, etc. The problem is to reduce the generation of large particles, improve the ionization rate, and increase the utilization rate.

Active Publication Date: 2020-12-04
WENZHOU POLYTECHNIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] With the development of technology, the arc source of DC arc ion plating has been continuously improved. For the conventional nitride coating, its large particles have been well controlled, but for the preparation of oxides, the DC power supply in the arc discharge process, Insulating oxide on the target surface is likely to cause poor conductivity on the target surface, and aluminum with a low melting point is likely to cause arc spot movement and aggregation, resulting in bursts of large particles, which affect the coating quality

Method used

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  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc
  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc
  • Method for preparing aluminum oxide coating by modulating high-current pulsed arc

Examples

Experimental program
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Effect test

Embodiment 1

[0066] Embodiment 1, the aluminum oxide coating that utilizes pulsed arc technology to prepare on the cutting tool

[0067] Explanation: In this example, the binary nitride AlTiN is used as the base layer, and an aluminum oxide coating is deposited on the base again, and then TiN is deposited as a decorative functional layer.

[0068] The coating equipment used in the present invention is with the equipment size of routine industrial application: diameter D=1m, the equipment of height H=1m, carries out coating preparation, adopts conventional octahedron structure to carry out equipment description, is equipped with on the equipment Four rows of arcs, each row of arcs has 3 cathode arc sources.

[0069] see image 3 Shown: the first column is equipped with 3 Ti targets, the second column is equipped with 3 AlTi (40 / 60) targets, the third column is equipped with 3 pure metal Al targets, and the fourth column is equipped with 3 AlTi (50 / 60) targets 50).

[0070] Referring to t...

Embodiment 2

[0079] Embodiment two, the composite coating that utilizes pulsed arc technology to prepare on the cutting tool

[0080] Explanation: In this example, the ternary nitride AlTiCrN is used as the base layer, and a composite coating containing an aluminum oxide coating is deposited on the basis again, and then TioN is deposited as a decorative functional layer.

[0081] see image 3 Shown: the first column is equipped with 3 Ti targets, the second column is equipped with 3 AlTi (50 / 50) targets, the third column is equipped with 3 pure metal Al targets, and the fourth column is equipped with 3 AlCr (30 / 50) targets 70); In this embodiment, the arc sources in the 2nd, 3rd and 4th rows are applied with pulsed arc power.

[0082] Referring to table 2, the main process parameters of the present embodiment are as follows:

[0083] 1. Draw a vacuum, heat to 450°C, and set the speed to 2 revolutions / min

[0084] 2. Turn the baffle to the front of the Ti target, pump in argon gas 300 an...

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Abstract

The invention belongs to the technical field of surface coating preparation, and particularly relates to a method for preparing an aluminum oxide coating by modulating a high-current pulsed arc. The method comprises the following steps that a functional layer is formed, wherein the functional layer is a single layer formed by depositing aluminum oxide or a single layer formed by depositing aluminum oxynitride or a multi-layer composite coating formed by alternately depositing nitride and aluminum oxide; the aluminum oxide or aluminum oxynitride is formed by modulating high-current pulse arc discharge deposition; and the modulated high-current pulse arc adopts direct-current base current and low-frequency large-beam pulse current as a discharge power supply to perform arc discharge. Stablearc discharge is achieved through low-base-value current in a pulse arc discharge technology, accumulation poisoning of an oxide layer in the target surface discharge process is avoided through instantaneous maximum peak current, the ionization rate of oxygen is increased, an oxide coating is fully formed, arc spots are made to cover the whole target surface, generation of large particles in the arc discharge process is reduced, the ionization rate of particles is improved, and the high-quality and high-performance aluminum oxide coating is obtained.

Description

technical field [0001] The invention belongs to surface coating preparation technology, in particular to a method for preparing aluminum oxide coating by modulating high-current pulse arc. Background technique [0002] In the process of high-speed and dry cutting, a large amount of cutting heat may be generated between the surface of the machining tool and the workpiece, and its surface temperature can reach above 1000°C. Excessive temperature will lead to the failure of the surface coating of the material (the red hardness of the coating ), and at this stage, the red hardness temperature of the nitride coating on the tool surface only reaches 1000°C, which cannot satisfy the high-speed machining and dry cutting required by the modern machining industry. [0003] Al2O3 coating has high wear resistance and red hardness, and still has good thermal stability above 1000 ° C. At the same time, aluminum oxide coating also has good thermal barrier properties, which is a common ther...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/08
CPCC23C14/325C23C14/081C23C14/0676C23C14/0641
Inventor 郎文昌
Owner WENZHOU POLYTECHNIC
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