Flexible micro-chromatographic column with thin metal inner lining and preparation method thereof

A metal lining and chromatographic column technology, applied in the field of gas chromatography, can solve the problems of decreased separation performance, large temperature difference of the chromatographic column, unsynchronized elution process, etc., to eliminate the broadening of chromatographic peaks, and to emphasize the controllability and separation effect. , the effect of improving the uniformity of the temperature field

Active Publication Date: 2022-02-08
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Chromatography is a device that needs to be heated. In the constant temperature mode, it is statically heated. The chromatographic column is always heated evenly. A dynamic equilibrium process of heat transfer from the heating source to the entire chromatographic column. At this time, if the material with poor thermal conductivity is used as the substrate of the chromatographic column, there will be a large temperature difference in different parts of the chromatographic column, resulting in the elution process everywhere. Cannot be synchronized, resulting in broadening of chromatographic peaks and degraded separation performance

Method used

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  • Flexible micro-chromatographic column with thin metal inner lining and preparation method thereof
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  • Flexible micro-chromatographic column with thin metal inner lining and preparation method thereof

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Embodiment 1

[0033] 1. Structural design

[0034] In this embodiment, the flexible micro-chromatographic column with a thin metal inner lining of the present invention is made of polydimethylsiloxane (PDMS), and the cross-sectional structure of this chromatographic column is shown in Figure 1 (c), including A thick PDMS flexible top cover 1 and a 500um thick PDMS flexible substrate 6, the chromatographic microchannel 2 encapsulated between the flexible substrate 6 flexible top cover 1, and a thin film heater made of a platinum film on the lower surface of the micro chromatographic column 7, and a copper thin film metal lining 8 with a thickness of about 1 μm deposited on the inner wall of the chromatographic microchannel 2 and a SE-54 stationary phase thin film 9 coated on the metal lining copper film 8 . The cross-section of the chromatographic microchannel 2 is rectangular, and the depth is about 350um. The projection of the microchannel on the upper surface of the flexible substrate ...

Embodiment 2

[0058] In this embodiment, polyimide (PI) is used as the base material of the flexible chromatographic column, and PDMS is still used as the top cover material. The device structure is exactly the same as that of Embodiment 1.

[0059] 1. Device processing

[0060] (1) MEMS processing of micro-chromatographic channels: Oxygen plasma deep groove etching technology was used to etch the channels of micro-chromatographic columns and the interfaces at both ends on the PI film with a thickness of 500 μm, and the etching depth was 350 μm.

[0061] (2) Channel sealing: select a 100 μm thick PDMS film, after cleaning, use oxygen plasma for surface treatment for 1 min, and then immediately attach it to the front of the above-mentioned PI substrate with a chromatographic channel structure, at 70 ° C Treat for 15min.

[0062] (3) Heater preparation: same as embodiment 1.

[0063] (4) Copper thin film coating on the inner cavity of the chromatographic channel: same as in Example 1.

...

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Abstract

The invention discloses a flexible microchromatographic column with a thin metal inner lining and a preparation method thereof. A thin-film heater is arranged on the lower surface of the chromatographic column, and a metal lining is deposited on the inner wall of the chromatographic microchannel, and a stationary phase film is coated on the metal lining. The invention utilizes the high thermal conductivity of metal to provide a lining layer with a highly uniform temperature for the stationary phase film, so that the temperature of the stationary phase film attached to the thin layer of metal material has a good transient state even when the heat source heats up rapidly The temperature uniformity ensures that the flexible chromatographic column can work in the rapid heating mode. At the same time, the metal lining layer is very thin and coated in the inner cavity of the polymer structure, which will not change the overall softness of the structure and will not affect its application in wearable scenarios.

Description

technical field [0001] The invention relates to the technical field of gas chromatography, in particular to a flexible micro-chromatographic column with a thin-layer metal lining and a preparation method thereof. Background technique [0002] Flexible and wearable sensors are the research frontier and hotspot in the world in recent years, and there is no lack of research on flexible gas sensors. The flexible gas sensor can be worn on a breathing mask to continuously monitor the disease marker gas in the exhaled breath of the human body; it can also be worn on clothes to detect the gas in the environment where the human body is located, such as whether there is formaldehyde in the home environment, whether there is formaldehyde in the public environment Explosive, toxic gas, etc. There are many kinds of interfering components in the above application scenarios without exception, and it is difficult to test accurately only by gas sensors. If chromatographic technology can be...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/02G01N30/52G01N30/54G01N30/56G01N30/60B81B1/00B81C1/00
CPCG01N30/02G01N30/6095G01N30/56G01N30/52G01N30/54B81B1/00B81C1/00063B81C1/00214G01N2030/567G01N2030/527
Inventor 杜晓松孙洁方子龙许成成王洋太惠玲谢光忠
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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