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Apparatus for a oxide powder

A technology for oxide powder and manufacturing equipment, applied in tin oxide, chemical/physical processes, gallium/indium/thallium compounds, etc., can solve the problems of reducing the characteristics of oxide powder and increasing the cohesion between powders

Inactive Publication Date: 2020-09-04
주식회사더방신소재
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the above-mentioned oxide powder production method, the intermediate compound of several nm to tens of nm is calcined to achieve the purpose of separation, oxidation, and crystallization of metal ions. Therefore, the activated particles will form Neck based on the diffusion phenomenon, which increases the cohesion between powders and reduces the characteristics of oxide powders

Method used

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  • Apparatus for a oxide powder
  • Apparatus for a oxide powder
  • Apparatus for a oxide powder

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Embodiment Construction

[0022] figure 1 It is a figure which shows the overall structure of the oxide powder manufacturing apparatus of this invention. refer to figure 1 , The oxide powder manufacturing device 100 of the present invention includes: an evaporation chamber 200, which heats a solid reaction substance to evaporate it into an oxide in a droplet state; an oxidation reaction chamber 300, which is arranged on the evaporation chamber 200 side, to pulverize the steam of the reaction substance generated in the evaporation chamber 200; the transfer pipe 130, used to move the powder generated in the oxidation reaction chamber 300; at least one trapping unit 120, used to Trapping of moving oxide powder.

[0023] The transfer pipe 130 is arranged between the oxidation reaction chamber 300 and the trapping unit 120, and in the case of a plurality of trapping units 120, the transfer pipe 130 is also arranged between the trapping units, The action of moving the oxide in the droplet state is thereby...

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Abstract

The present invention provides an oxide powder manufacturing device. The oxide powder manufacturing device comprises an evaporation chamber as a reaction unit for heating a solid state of reaction material for evaporation, wherein the reaction material is accommodated in the evaporation chamber; an oxidation reaction chamber arranged on the upper side of the evaporation chamber and used for oxidize a reactant in the liquid state moving from the evaporation chamber; at least one trap for trapping oxide powder generated from the oxidation reaction chamber; a movable pipe arranged between the trap and the reaction unit for moving the oxide in the droplet state, and a controller for controlling the evaporation chamber, the oxidation reaction chamber, the movable pipe and the trap.

Description

technical field [0001] The present invention relates to an oxide powder production device, and more specifically relates to a method for evaporating solid reaction substances into a droplet state, thereby producing oxide powders with less agglomeration and uniform size, especially less agglomeration and smaller sizes. device of nano-oxide powders. Background technique [0002] In general, the sputtering method is recognized as one of the methods for producing thin films. The sputtering method is a method of forming a thin film on a substrate by sputtering a sputtering target. This method has the advantages of being easy to achieve a large area and capable of efficiently producing a high-performance thin film. [0003] Furthermore, recently, reactive sputtering method in which reactive gas is sputtered, magnetron sputtering method in which magnetrons are provided on the inner surface of a target to accelerate thin film formation, etc. have been proposed as sputtering methods...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J6/00B01J19/00C01G15/00C01G19/02
CPCB01J6/00B01J19/00C01G15/00C01G19/02B01J19/0053B01J19/06B01J2219/00051B01J2219/0036B01J2219/00761
Inventor 金泰石张信翼金石渊李雅凛
Owner 주식회사더방신소재
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