A kind of silicon solar cell and its manufacturing method
A technology of silicon solar cells and manufacturing methods, applied in the field of solar cells, to achieve the effect of solving the phenomenon of potential-induced attenuation and solving local charge accumulation
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Embodiment 1
[0021] A method for making a silicon solar cell, comprising the steps of:
[0022] Step 1, the silicon substrate is textured, diffused and etched, and then plasma cleaning is performed to achieve a clean surface; the texture is acid textured, the diffusion is phosphorus diffusion, and the plasma cleaning uses nitrogen, plasma The cleaning time is 30s;
[0023] Step 2, apply the ethyl silicate ethanol solution evenly on the surface of the silicon substrate, dry at a constant temperature in a humid environment for 2 hours, and then heat up and dry for 30 minutes to form an anti-reflection film; the ethyl silicate in the ethyl silicate ethanol solution The concentration of the ester is 0.02mol / L, and the ethyl silicate solution is evenly sprayed on the surface of the silicon substrate to form a good liquid film structure, and the spraying amount is 2mL / cm 2 , the humidity of the humid environment is 30%, the temperature of constant temperature drying is 80°C, the temperature of ...
Embodiment 2
[0027] A method for making a silicon solar cell, comprising the steps of:
[0028] Step 1, the silicon substrate is textured, diffused and etched, and then plasma cleaning is performed to achieve a clean surface; the texture is acid textured, the diffusion is phosphorus diffusion, and the plasma cleaning uses nitrogen, plasma The cleaning time is 900s;
[0029] Step 2, apply the ethyl silicate ethanol solution evenly on the surface of the silicon substrate, dry at a constant temperature in a humid environment for 4 hours, and then heat up and dry for 120 minutes to form an anti-reflection film; the ethyl silicate in the ethyl silicate ethanol solution The concentration of the ester is 0.02mol / L, and the ethyl silicate solution is evenly sprayed on the surface of the silicon substrate to form a good liquid film structure, and the spraying amount is 5mL / cm 2 , the humidity of the humid environment is 30%, the temperature of constant temperature drying is 90 ° C, the temperature...
Embodiment 3
[0033]A method for making a silicon solar cell, comprising the steps of:
[0034] Step 1, the silicon substrate is textured, diffused and etched, and then plasma cleaning is performed to achieve a clean surface; the texture is acid textured, the diffusion is phosphorus diffusion, and the plasma cleaning uses nitrogen, plasma The cleaning time is 500s;
[0035] Step 2, apply the ethyl silicate ethanol solution evenly on the surface of the silicon substrate, dry at a constant temperature in a humid environment for 3 hours, and then heat up and dry for 90 minutes to form an anti-reflection film; the ethyl silicate in the ethyl silicate ethanol solution The concentration of the ester is 0.02mol / L, and the ethyl silicate solution is evenly sprayed on the surface of the silicon substrate to form a good liquid film structure, and the spraying amount is 4mL / cm 2 , the humidity of the humid environment is 30%, the temperature of constant temperature drying is 85°C, the temperature of ...
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