Ultra-precision flexible chemical mechanical polishing device and method for micro bearing core element

Abstract

The invention discloses an ultra-precision flexible chemical mechanical polishing device and method for a micro bearing core element. The core element comprises an inner ferrule, a retainer, a rollingbody and an outer ferrule. The polishing device comprises an element rotation module, an outer ferrule steering module, an element clamping module, a polishing liquid pool rotation module and a support. The element clamping module provides an inner ferrule clamp, a retainer clamp, a rolling body clamp and an outer ferrule clamp in a targeted manner. The polishing method comprises the steps of installing and debugging the polishing device, preparing flexible chemical mechanical polishing liquid, setting polishing process parameters, measuring the surface quality and conducting feedback. The flexible chemical mechanical polishing liquid comprises non-Newtonian fluid, 0.01-40 wt% of grinding particles, 0-10 wt% of an oxidizing agent, 0-10 wt% of a metal complexing agent, 0-5 wt% of a metal corrosion inhibitor and the balance water, and the pH value is 2.0 to 10.0. According to the ultra-precision flexible chemical mechanical polishing device and method, by optimizing the synergistic effect of the chemical reaction and the mechanical force of the force rheological effect, ultra-precision low-damage machining and complex curved surface shape-preserving machining of the surface of the core element can be achieved, and the device and method are green and environment-friendly.

Description

technical field [0001] The invention relates to the technical field of ultra-finishing, in particular to an ultra-precision flexible chemical-mechanical polishing device and method for core components of miniature bearings. Background technique [0002] Miniature bearings refer to all kinds of bearings whose outer diameter is less than 9mm in metric series and less than 9.525mm in imperial series. With the increasing demand for lightweight, miniaturization and precision of mechanical products, miniature bearings are more and more widely used in various precision micro-equipment. For example, in the medical field, miniature bearings are widely used in dental high-speed handpieces to achieve precise tooth cutting operations. If the processing accuracy is not high, noise and vibration will be generated, and even damaged during the operation, it will bring serious harm to the patient. Great discomfort and pain; in addition, miniature bearings are also widely used in blood pumps...

AI Technical Summary

Problems solved by technology

However, this method mainly utilizes the micro-cutting effect of abrasive grains or micropowder on the workpiece to remove the material on the surface of the workpiece. During removal, the contact pressure needs to reach the plastic yield limit of the material, the minimum removal thickness is limited, and the surface quality of the core components is difficult to further improve. and because the hardness of abrasive grains or micropowder is much higher than that of the workpiece, it is very easy to produce scratches on the surface of the workpiece; at the same time, this method is proposed as a general surface polishing method, and it is not proposed according to the characteristics of miniature bearings. Special device and method suitable for polishing core components of miniature bearings

[0006] To sum up, chemical mechanical polishing technology is currently only suitable for ultra-precision machining of planar parts, and cannot be directly applied to ultra-precision machining of complex curved surfaces of the core components of miniature bearings.

The ultra-precision curved surface polishing method based on the shear thickening effect of non-Newtonian fluid is limited by the principle of pure mechanical removal. Polishing applied directly to the core components of miniature bearings

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