Electrical Test Monitoring Feedback Chemical Vapor Deposition System and Its Application

A technology of chemical vapor deposition and monitoring feedback, which is applied in the field of chemical vapor deposition systems to achieve the effects of strong flexibility, good assembly and high temperature sealing performance, and strong corrosion resistance

Active Publication Date: 2021-12-24
南通普朗克石墨烯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Aiming at the problem in the prior art that it is necessary to stop the reaction and take out the sample for detection and analysis of materials with atomic layer thickness, the present invention provides a real-time monitoring and feedback chemical vapor deposition system for electrical testing, which conducts electrical testing on samples in real time during the growth process of the samples. Test analysis, realize real-time monitoring and feedback of the growth process and how to use the electrical test system to monitor the feedback, realize the preparation of target samples and efficiently prepare two-dimensional nano-films with atomic-level thickness

Method used

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  • Electrical Test Monitoring Feedback Chemical Vapor Deposition System and Its Application
  • Electrical Test Monitoring Feedback Chemical Vapor Deposition System and Its Application
  • Electrical Test Monitoring Feedback Chemical Vapor Deposition System and Its Application

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Embodiment 1

[0050] Equipment structure and connection mode of the present invention are:

[0051] An electrical test monitoring feedback chemical vapor deposition system includes a chemical vapor deposition system and an electrical test system. Chemical vapor deposition system includes high temperature heating system, gas source system, vacuum system and tail gas treatment system. Such as figure 1 As shown, the high-temperature heating system includes a high-temperature furnace 10 and a furnace tube. The furnace tube is a three-way furnace tube 50, specifically a three-way quartz tube. A carrier made of ceramic material is arranged directly below the upper opening 51 of the three-way furnace tube 50. Sample stage, place SiO2 on the sample stage 2 / Si substrate 52 . The electrical test system includes a four-probe test rod 60 connected by built-in wires and a four-probe tester 67 , and the four-probe tester 67 is connected to an electrical test analysis system 68 . The four-probe test ...

Embodiment 2

[0062] An excellent property of graphene in terms of electron mobility is that its mobility hardly changes with temperature. The reason why electrons are affected by temperature is that electron mobility is reduced due to the scattering effect of lattice vibrations in electron transfer, and the strength of lattice vibrations is proportional to temperature, but the lattice vibrations of graphene seldom scatter electrons. , so it is hardly affected by temperature.

[0063] At the same time, the electrical properties of the graphene film are mainly determined by the number of layers. The current modulation increases monotonically with decreasing number of layers due to the decrease in interlayer scattering. When the number of layers is reduced from bilayer graphene to single-layer graphene, the mobility increases dramatically due to the inherent change from quadratic to linear dispersion relation, with the carrier mobility in a single layer being significantly greater than that ...

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Abstract

The invention discloses an electrical test monitoring feedback chemical vapor deposition system and an application thereof, belonging to the field of chemical vapor deposition. The system includes a chemical vapor deposition system and an electrical testing system, the chemical vapor deposition system includes a high-temperature furnace, the furnace cavity in the high-temperature furnace is provided with a three-way furnace tube passing through the high-temperature furnace, and the three-way furnace tube is provided with The upper opening is provided with a sample loading platform directly below the upper opening; the electrical test system includes a four-probe test rod connected by a built-in wire and a four-probe tester; the four-probe test rod is sealed and connected to the upper opening . The present invention combines the chemical vapor deposition system with the electrical test system through the transformation of the furnace tube of the chemical vapor deposition system, thereby effectively realizing the real-time monitoring of the growth quality of the sample and timely feedback to the control system to adjust the growth parameters and generate atoms. The sample with layer thickness has strong flexibility, good film forming effect and high sample performance.

Description

technical field [0001] The invention belongs to the technical field of a chemical vapor deposition system for growing two-dimensional materials, and more specifically relates to an electrical test monitoring feedback chemical vapor deposition system and its application, which can realize the monitoring and feedback of sample growth. Background technique [0002] In 2004, for the first time, human beings used mechanical exfoliation to prepare a real two-dimensional material: graphene. Its appearance injected fresh blood into the development of condensed matter physics. After that, in addition to graphene, two-dimensional hexagonal boron nitride Two-dimensional materials such as sulfides, transition metal sulfides, oxides, and black phosphorus have also entered everyone's field of vision, expanding the performance and application of two-dimensional materials. At present, laboratories generally use chemical vapor deposition to prepare large-size, high-quality two-dimensional ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/26C23C16/455C23C16/52C23C16/54G01R31/00G01R27/02
CPCC23C16/26C23C16/455C23C16/52C23C16/54G01R31/00G01R27/02
Inventor 于葛亮韩亚清肖经宽杜人君蒋思奇张棣康斯坦丁·诺沃肖洛夫
Owner 南通普朗克石墨烯科技有限公司
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