A Coplanar Suspended Fully Isolated Sensor

Abstract

The invention discloses a coplanar suspension type full-isolation sensor. The sensor comprises a shell, a base is arranged at the bottom of the shell, a suspension core is arranged in the shell, the suspension core is of a transversely-arranged cylindrical shell structure, electrode plates are arranged in the middle in the suspension core in a bilateral symmetry mode, and a center measuring diaphragm is arranged between the two electrode plates. The coplanar suspension type full-isolation sensor is characterized in that the suspension core is far away from a process pressure containing chamber; mechanical and thermal isolation is realized, so that the suspension core body is not in direct contact with a process heat source and a pressure source; the mechanical stress on the suspension corebody is released, and the static pressure performance is improved; the wide range ratio reaches 100: 1; according to the installation mode of the rigid insulator sintered wire, the oil filling pipe and the suspension core body, the capacitor plate and the suspension core body are in laser welding connection, full isolation is achieved, electrical insulation is guaranteed, and the flexibility, performance and transient voltage resistance protection capacity of the electronic circuit board are improved; and the high precision of 0.075% is realized.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a coplanar suspension type fully isolated sensor. Background technique [0002] Transmitter is a converter that converts the output signal of the sensor into a signal that can be recognized by the controller (or converts the non-electricity input by the sensor into an electrical signal and amplifies it for remote measurement and control). Sensors and sensors together constitute a monitoring signal source for automatic control. Different physical quantities require different sensors and corresponding sensors. There are many types of sensors, and the sensors used in industrial control instruments mainly include temperature sensors, pressure sensors, flow sensors, current sensors, voltage sensors, etc.; [0003] Capacitive pressure sensor is a commonly used sensor product, which is mainly composed of three parts: load cell sensor (also called pressure sensor), measuring circuit an...

AI Technical Summary

Problems solved by technology

[0004] However, the traditional capacitive pressure sensor has a rigid structure, cannot achieve coplanar suspension, and has a low service life. For this reason, the inventor proposed a coplanar suspension fully isolated sensor based on various factors.

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