Method for preparing rare earth silicate ceramics by chemical vapor deposition of oxygen-containing precursor
A chemical vapor deposition and rare earth silicate technology, which is applied in the field of preparing rare earth silicate ceramics by chemical vapor deposition of oxygen-containing precursors, can solve problems such as affecting the service life of SiCSiC materials.
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Embodiment 1
[0028] Step 1: Raw material preparation: wt20% yttrium oxide, wt75% water, wt2% binder polyvinyl alcohol, wt1% dispersant ammonium polyacrylate, wt2% sintering aid lithium carbonate
[0029] Step 2: Slurry configuration and impregnation:
[0030] a. The mixed solution of wt75% water, wt2% polyvinyl alcohol, wt1% ammonium polyacrylate and wt2% lithium carbonate was magnetically stirred, the stirring time was 30min, and the stirring rate was 100r / min;
[0031] b. Add wt20% yttrium oxide to the obtained uniformly mixed liquid, and perform ball milling, the rotating speed of the ball milling drum is 120r / min, and the ball milling time is 12h, to obtain a uniformly mixed yttrium oxide slurry;
[0032] c. Vacuum and pressure impregnate the semi-dense ceramic matrix composite with yttrium oxide slurry, and dry at 120°C.
[0033] Step 3: Preparation of yttrium silicate by chemical vapor deposition: CH 3 SiCl 3 As a precursor, CO 2 As oxygen source, hydrogen as carrier gas and dilu...
Embodiment 2
[0036] Step 1: Raw material preparation: wt20% yttrium oxide, wt75% water, wt2% binder polyvinyl alcohol, wt1% dispersant ammonium polyacrylate, wt2% sintering aid lithium carbonate
[0037] Step 2: Slurry configuration and impregnation:
[0038] a. The mixed solution of wt75% water, wt2% polyvinyl alcohol, wt1% ammonium polyacrylate and wt2% lithium carbonate was magnetically stirred, the stirring time was 30min, and the stirring rate was 100r / min;
[0039] b. Add wt20% yttrium oxide to the obtained uniformly mixed liquid, and perform ball milling, the rotating speed of the ball milling drum is 120r / min, and the ball milling time is 12h, to obtain a uniformly mixed yttrium oxide slurry;
[0040] c. Vacuum and pressure impregnate the semi-dense ceramic matrix composite with yttrium oxide slurry, and dry at 120°C.
[0041] Step 3: Preparation of yttrium silicate by chemical vapor deposition: CH 3 SiCl 3 As a precursor, CO 2 As oxygen source, hydrogen as carrier gas and dilu...
Embodiment 3
[0044] Step 1: Raw material preparation: wt20% yttrium oxide, wt75% water, wt2% binder polyvinyl alcohol, wt1% dispersant ammonium polyacrylate, wt2% sintering aid lithium carbonate
[0045] Step 2: Slurry configuration and impregnation:
[0046] a. The mixed solution of wt75% water, wt2% polyvinyl alcohol, wt1% ammonium polyacrylate and wt2% lithium carbonate was magnetically stirred, the stirring time was 30min, and the stirring rate was 100r / min;
[0047] b. Add wt20% yttrium oxide to the obtained uniformly mixed liquid, and perform ball milling, the rotating speed of the ball milling drum is 120r / min, and the ball milling time is 12h, to obtain a uniformly mixed yttrium oxide slurry;
[0048] c. Vacuum and pressure impregnate the semi-dense ceramic matrix composite with yttrium oxide slurry, and dry at 120°C.
[0049] Step 3: Preparation of yttrium silicate by chemical vapor deposition: CH 3 SiCl 3 As a precursor, CO 2 As oxygen source, hydrogen as carrier gas and dilu...
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