A kind of exposure equipment and exposure system
A technology of equipment and abutment, which is applied in the direction of microlithography exposure equipment, photomechanical equipment, and photolithography process exposure equipment, etc., which can solve the problems of bending deformation of the mask plate, uneven distribution of ultraviolet rays, and poor uniformity of line width of exposed products, etc. , to achieve the effect of improving line width uniformity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0045] In order to make the purpose, technical solution and advantages of the present invention more clear, the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.
[0046] The technical content of the present invention will be described in detail below through specific embodiments.
[0047] image 3 It is a schematic structural diagram of an exposure device according to an embodiment of the present invention, Figure 4 for image 3 The schematic diagram of the decomposition mechanism, such as image 3 and Figure 4As shown, the exposure equipment includes a base 23 and a base 21 positioned above the base 23 for carrying the substrate to be exposed. The exposure equipment also includes at least one adjustment device 22 arranged betwee...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com