A recording electrode with serpentine metal shielding structure and its preparation process

Abstract

The invention provides a recording electrode with an S-shaped metal shielding structure and a preparation technology. The recording electrode is provided with an S-shaped metal shielding layer, and the S-shaped metal shielding layer is located between an electromagnetic interference source and a metal electrode layer and used for attenuating electromagnetic interference. The recording electrode further comprises an S-shaped polymer substrate layer, an S-shaped polymer intermediate insulating layer, an S-shaped metal electrode layer and an S-shaped polymer packaging layer, each structural layer adopts an S-shaped bending structure, and the integrated flexible photoelectric electrode has stretchability, can collect neutral signals normally in a certain deformation range and meets the actual application demands. The invention further provides a preparation technology of the recording electrode with the S-shaped metal shielding structure. The prepared recording electrode not only can effectively reduce influence of the electromagnetic interference on neural signal collection quality, but also can deform with electrode structure stretching and can be applied to animal tissue with deformation.

Description

technical field [0001] The invention relates to a neural microelectrode in the technical field of biomedical engineering, in particular to a recording electrode with a serpentine metal shielding structure and a preparation process. Background technique [0002] As a bridge between neural tissue and external devices, neural interfaces are not only widely used in neuroscience research, but also provide effective treatments for neurological diseases such as Parkinson's disease, depression, and stroke. With the advent of optogenetics, by introducing a light source with a specific wavelength and a small size into the neural interface, it is possible to activate or inhibit a specific type of neuron in the sub-millimeter region to achieve high-resolution optical neuromodulation. , has increasingly become one of the indispensable tools in neuroscience and brain science research. [0003] However, in the process of integrating micro-LED chips or micro-LD chips with a size of tens to...

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Problems solved by technology

However, the application of this type of structure is limited to Michigan silicon needle electrodes, and cannot be applied to flexible electrodes for optoelectronic integration.

[0005] KimT, McCallJG and others from the University of Illinois at Urbana-Champaign in the United States wrote "Injectable, cellular-scale optoelectronics with applications for wireless optogenetics" in Science, 2013, 340 (6129): 211-216, proposing to integrate micro LED chips, recording electrodes, light and temperature sensors on flexible substrates On the above, a multi-functional flexible needle-like piercing electrode was obtained, which was used in the study of the mouse deep brain optogenetics model, but did not consider the influence of electromagnetic interference introduced by the micro-LED chip array layer; in the same year, KwonKY, Michigan State University, SirowatkaB et al wrote "Opto-μECoGarray: Ahybrid neural interface with transparent μECoGelectrode array and integrate dLEDs for optogenetics" in IEEE transactions on biomedical circuits and systems, 2013, 7 (5): 593-600, proposing to integrate micro-LED chip arrays and ITO recording electrodes on flexible substrates to obtain flexible photoelectric electrodes for The study of the optogenetic model of the rat cerebral cortex also did not consider the influence of the electromagnetic interference introduced by the wires of the active micro-LED chip on the quality of the electrical signal acquisition of the cerebral cortex.

[0006] In addition, VomeroM, CruzMFP and others from the IMTEK Institute of the University of Freiburg in Germany wrote "Achieving ultra-conformability with polyimide-based ECoGarrays" in IEEEEMBC, 2018: 4464-4467, proposing to add a large-area metal shielding layer to the flexible cortical microelectrode And grounding, used to limit the signal crosstalk between the various wire paths, but it cannot be deformed, such as stretching with the electrode structure, etc., and it is not combined with active optical devices, so it cannot be used for synchronous photostimulation

[0007] To sum up, there are no relevant reports on the electromagnetic shielding problem of flexible photoelectric electrodes, whether in patents or literature. However, in actual animal experiments, due to the introduction of active optical devices such as LEDs or LDs near the recording electrodes, the electromagnetic Interference has a significant impact on the quality of neural signal acquisition, so it is urgent to propose an electromagnetic shielding structure suitable for flexible optoelectronic integrated electrodes to cope with neuroscience research based on optogenetics

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