On-chip terahertz sensing enhancement device based on super-surface and lithium niobate hybrid structure

Abstract

The invention discloses an on-chip terahertz sensing enhancement device based on a super-surface and a lithium niobate hybrid structure. The purpose of the invention is to carrying out high-sensitivity detection on trace biochemicals. The detection of different medicine in a wider frequency range is realized by adjusting the length of a metal antenna and the thickness of dielectric layer silicon dioxide. The adopted scheme is as follows: a sub-wavelength lithium niobate waveguide surface on which a silicon dioxide layer is deposited is coated with an antenna array super-surface, and then a thin layer of chemicals is applied to the super-surface. Plasma on the local surface of the antenna is excited, and so the absorption of light in a characteristic frequency band by the substances is enhance so as to realize the high-sensitivity detection of the substances. The on-chip terahertz sensing enhancement device based on the super-surface and the lithium niobate hybrid structure solves the problems of weak signal caused by small sample size and weak light field effect. The on-chip terahertz sensing enhancement device based on the super-surface and the lithium niobate hybrid structure hasthe significant characteristics of simple device, small size, variety of measurement, high sensitivity, easy convenient and the like, and is widely used in the detection of terahertz characteristicsspectrums of trace substances in the field of biochemistry, medicine and the like.

Description

technical field [0001] The invention relates to an on-chip terahertz sensing enhancement device, which is especially suitable for detecting the terahertz characteristic absorption spectrum of trace biochemical drugs. Background technique [0002] The terahertz wave band (0.1THz to 10THz) is an electromagnetic wave band between microwave and infrared, and has many excellent properties, such as: terahertz wave has strong penetrability; photon energy is low (4meV / THz), and it will not cause damage to biological tissues. Photoionization damage; many biological macromolecules and chemicals have obvious characteristic absorption peaks in the terahertz band. Therefore, the use of terahertz characteristic spectrum to detect biochemical and drug macromolecules can be widely used in the fields of biomedicine and sensor detection. At present, there are relatively few domestic studies on detection devices in the terahertz frequency band. Due to the limitations of factors such as the sm...

AI Technical Summary

Problems solved by technology

At present, there is relatively little research on detection devices in the terahertz frequency band in China. Due to the limitations of factors such as the small scale of the detection material and the weak detection signal strength, there is an urgent need for effective terahertz sensors.

Images