Gallium oxide vertical junction field effect transistor and preparation method thereof
A field-effect transistor and vertical junction technology, which is applied in transistors, semiconductor/solid-state device manufacturing, semiconductor devices, etc., can solve the problems of poor gate control characteristics and difficult gate dielectric preparation, so as to ensure gate control characteristics and good gate control characteristics. The effect of control characteristics and simple preparation process
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[0018] Such as figure 1 , 2 As shown, a gallium oxide vertical junction field effect transistor according to the present invention includes: a gallium oxide drift layer 103 , an n-type doped gallium oxide substrate 102 and a drain electrode 101 are stacked in sequence. The side of the gallium oxide drift layer 103 away from the n-type doped gallium oxide substrate 102 extends outwards with several ribs, and the ribs are sequentially stacked in a direction away from the n-type doped gallium oxide substrate 102 to form gallium oxide contacts. layer 104 and source electrode 105. Both sides of the ribs are filled with a p-type oxide semiconductor layer 106 , and the surface of the p-type oxide semiconductor layer 106 is provided with a gate electrode 107 . The p-type oxide semiconductor layer 106 and the gate electrode 107 are in Schottky contact or ohmic contact; the drain electrode 101 is in ohmic contact with the surface of the n-type doped gallium oxide substrate 102; the so...
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