Hybrid cell type integrated IGBT device
A cell and device technology, applied in the field of hybrid cell type integrated IGBT devices, can solve the problems of reducing device switching speed and switching energy loss, etc.
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[0018] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0019] see Figure 1 to Figure 7 , a mixed cell-type integrated IGBT device according to a preferred embodiment of the present invention, the active region includes a groove cell region 2 and a planar cell region 3, and the groove cell region is composed of groove-type IGBT cells, The planar cell region is composed of planar IGBT cells.
[0020] The hybrid cellular integrated IGBT device of the present invention integrates two IGBT structures with different application characteristics into a single IGBT chip, and combines the advantages of the two IGBTs, so that the conduction voltage of the existing trench IGBT is reduced, and the current The advantages of high density,...
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